Spellman Announces the New MSC2.5PN7.5 for Electrostatic Chuck

September 20, 2021

Hauppauge New York – Spellman High Voltage Electronics Corp, the world’s leading high voltage power supply, X-Ray generator and Monoblock® X-Ray source manufacturer, announces the introduction of the MSC2.5PN7.5, a bipolar reversible power supply specifically designed for Electrostatic Chuck (ESC) clamping applications. ESCs use a platen with integral electrodes which are biased with high voltage to establish an electrostatic holding force between the platen and wafer, thereby “chucking” the wafer. This unit is designed to provide the High Voltage to drive the electrodes.

Two 0 to 2500 volt @ 7.5 watt reversible outputs that are of opposite polarity are provided on the two high voltage output connectors. Front panel controls via programming buttons and an LCD display allow local operation and control of the unit. The RS-232/RS-485/Ethernet digital interface allows for simple OEM integration into complex system designs.

Input is +24Vdc and current is 0 to 3mA. It is arc and short circuit protected as well as RoHS and CE compliant.

Detailed technical information and datasheet on the MSC2.5PN7.5 can be found here.

Spellman High Voltage Electronics is the world's leading provider of custom designed and standard AC-DC and DC-DC high voltage power converters and Monoblock® X-Ray sources for medical, industrial, semiconductor, security, analytical, laboratory, and under-sea cable power-feed applications. With design, manufacturing and service facilities in the US, UK, Mexico, China and Japan, and direct sales offices throughout Europe, Asia and North America, Spellman is committed to supporting advanced system providers and their customers throughout the world.

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