MSC2.5PN7.5 Series

MSC2.5PN7.5

  • Specifically Designed for E-Chuck Applications
  • +24Vdc Input
  • Bipolar Reversible Output
  • 300mS Slew Time Driving 20nF of Load Capacitance
  • Front Panel Control via Buttons and LCD Display
  • RS-232/RS-485 Interface

*Note: All specifications are subject to change without notice. Please consult the English PDF version of this datasheet for the most up-to-date revision.

RoHs Compliant logo

MSC2.5PN7.5 Electrostatic Chuck Power Supply

The MSC2.5PN7.5 is a bipolar reversible power supply specifically designed for electrostatic chuck clamping applications. Two 0 to 2500 volt @ 7.5 watt reversible outputs that are of opposite polarity are provided on the two high voltage output connectors. Front panel controls via programming buttons and an LCD display allow local operation and control of the unit. The RS-232/RS-485/Ethernet digital interface allows for simple OEM integration into complex system designs.

Specifications

(Ref. 128027-001 REV. B)

Input:

+24Vdc ±5% @ <2 amps. Switch controlled on front panel and fuse protected.

High Voltage Output 1 and Output 2 Voltage:

0 to ±2500 volts

Current:

0 to 3mA

Power:

7.5 watts, maximum

Polarity:

Bipolar, High Voltage Output 1 polarity always opposite of High Voltage Output 2

Voltage Control:

12 bits of resolution, full scale = 4096 volts, accuracy 1%

Regulation:

Line: <0.1% for 10% input voltage change under any load conditions

Load: <0.1% for zero to full load

Stability:

<0.1%/hour, <0.2%/8 hours at constant operating conditions after 1 hour warm up

Temperature Coefficient:

<50ppm per degree C

Ripple:

<0.1% p-p at full load, maximum output

Rise Time (no load):

All large scale signal changes. 0 to 2500 volts, 2500 volts to 0 will occur in 300 milliseconds or more to within 1% of final value.

Voltage Monitor:

12 bit resolution, full scale = 4096 volts, accuracy with 

Current Monitor:

12 bit resolution, full scale = 5.12mA, accuracy with respect to actual output current is ±2% (±100uA offset)

Typical Load Capacitance:

<20nF

Protection:

Arc and short circuit protected. Equipped with input and output current limits. Output current limit settable from 0.1mA to 3mA.

Not designed to withstand continuous arcing.

Auto-Toggle Function:

This unit has both a manual and a customer configurable automatic toggle function (degauss).

Communication:

The unit can be operated locally from the front panel. It can also be controlled through the RS-232/RS-485 serial interface, or Ethernet. The serial interface can be configured via the front panel to either RS-232 or RS-485. The unit is shipped from the factory set to RS-232. 9600 baud, no parity, no handshake or flow control. Note: When Ethernet is connected to the LAN port, Serial comms is disabled.

Front Panel Indicators:

The unit can be operated locally from the front panel. It can also be controlled through the RS-232/RS-485 serial interface,
or Ethernet. The serial interface can be configured via the front panel to either RS-232 or RS-485. The unit is shipped from the factory set to RS-232. 9600 baud, no parity, no handshake or flow control. Note: When Ethernet is connected to the LAN port, Serial comms is disabled.

Front Panel Controls:

The unit has front panel buttons for local control.

Local

The unit has front panel buttons for local control.

Toggle

Manual change of output polarity

Output On/Off

Soft turns the high voltage output on and off

Mode

Changes the mode of operation and navigation menu

Rotary Control/Enter

For navigating and entering value changes

Environmental:

Temperature Range:

Operating: 0˚C to 45˚C

Storage: -35˚C to 85˚C

Humidity:

0 to 85% RH, non-condensing

Input Power Connector:

2 pin Molex VersaBlade connector 

Serial Communications Connector:

9 pin female D connector 

High Voltage Output Connectors:

Radiall BNC-HT/MHV connector 

Cooling:

Convection cooled

Dimensions:

12.45˝ L x 8.03˝ W x 3.46˝ D (316mm x 204mm x 88mm)

Weight:

3.09lbs. (1.4kg)

Regulatory Approvals:

Designed to meet IEC/UL 61010-1 Safety requirements for electrical equipment for measurement, control and laboratory use; CAN/CSA-C22.2 No.61010-1. CE marked to EN 61010-1. RoHS compliant. As the unit is designed for incorporation within the users system it is not tested against any specific EMC standards. The user will need to take sensible EMC precautions when designing the unit in and verify the overall system EMC performance against any relevant standards.

 

INPUT POWER — MOLEX VERSABLADE 2 PIN CONNECTOR

PIN SIGNAL PARAMETER
1 +24Vdc +24Vdc @ 2A
2 +24Vdc Return (Gnd.) Power Ground

SERIAL COMMUNICATIONS — 9 PIN FEMALE D CONNECTOR

PIN SIGNAL I/O  SIGNAL PARAMETERS
1 NC -  Connection
2 Z/TXD I/O TXD RS-232/RS-485 Inverting 
3 Y/RXD I/O RXD RS-232/RS-485 Non Inverting 
4 NC - No Connection 
5 GND - Ground 
6 NC - Connection 
7 NC - Connection 
8 NC - Connection 
9 NC - Connection 

 

How To Order:
MSC2.5PN7.5

Tables & Diagrams

DIMENSIONS: in.[mm]

REAR VIEW

 MSC2.5PN7.5 Rear View   

TOP VIEW

FRONT VIEW

MSC2.5PN7.5 Front View