Semiconductor
Semiconductor
Today's complex semiconductor manufacturing processes require a variety of high voltage power solutions, most with extremely demanding specifications. Spellman products are used throughout the fab, from essentially the beginning of a wafer's journey to the end. Starting with lithography - powering light sources- to electrostatic wafer clamping to inspecting and testing devices, our precise, low noise, highly stable power supplies are, indeed, an enabling technology. Select an application area below to learn more about the solutions we offer. Where a standard product might not meet your exact needs, we can provide customized designs for OEM applications.
Electrostatic Chuck (E CHUCK)
In semiconductor and liquid crystal panel manufacturing processes, vacuum chucks and mechanical chuck systems have conventionally been used to secure the substrate for handling.
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Plasma Generation
Spellman supports plasma generation with high voltage power solutions that deliver stable output, fast regulation, and robust protection—helping OEMs drive repeatable plasma processes in industrial and scientific equipment.
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E-Beam Evaporation
High voltage power supplies for e-beam evaporation systems, designed for stable deposition, configurable arc intervention, fast slew rates, and multi-channel chamber setups.
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Flat Panel
Spellman High Voltage has been the preferred provider of high voltage power supplies for ion beam implanters used for flat panel display fabrication for over three decades.
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Sputtering
Spellman supports sputtering systems with high voltage power solutions that deliver stable output, fast regulation, and robust protection—helping OEMs maintain repeatable deposition processes and reliable tool uptime.
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Precision E-Beam/I-Beam
Electron beam and focused ion beam applications, while quite different, require very specialized high voltage power supplies with similar performance characteristics.
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Ion Implantation
Spellman supports ion implantation with precision high voltage power solutions that deliver stable beam control, fast regulation, and reliable operation—helping OEMs meet dose, energy, and uptime requirements in production tools.
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Thin Film Deposition
Spellman supports thin film processes with stable, reliable high voltage power solutions—enabling repeatable deposition and process control for coating, materials, and semiconductor manufacturing equipment.
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Scanning-Electron-Microscopes-SEM
Spellman supports scanning electron microscopes (SEM) with stable, low-noise high voltage solutions for electron guns and optics—helping OEMs achieve precise beam control, consistent imaging, and reliable instrument uptime.
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Focused Ion Beam (FIB)
Spellman has developed our FIB range with integrated high voltage supplies to drive the complete ion beam column with the performance required to achieve nm resolution. T
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Physical Vapor Deposition
Physical Vapor Deposition is a term that covers a variety of thin film deposition techniques, many of which require high voltage DC power. Two very common PVD processes are sputtering and electron beam evaporation (e-beam evaporation). Spellman offers both general purpose and application specific power supplies for both techniques. Spellman’s EVA Series is an ideal choice for e-beam evaporation systems. Designed using efficient and robust solid state circuit topologies, these supplies are highly tolerant of arcing and offer user configurable arc management settings that can be optimized for different processes and deposition conditions, to help maintain consistent and defect free coatings. The EVA Series power supplies are available in different configurations, including integrated filament supplies and multiple outputs, providing unmatched economy and flexibility. As with e-beam evaporation power supplies, response to arcing is important for stable and consistent plasma sputtering processes. Many of our standard rack mount and modular supplies can be optimized for use in sputtering, for instance by limiting stored energy and tailoring arc recovery times. Due to the wide range of requirements for plasma sputtering power supplies, we encourage you to contact our applications experts to discuss your unique specifications.
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High Voltage Testing
Spellman offers a wide range of high-voltage solutions for Semiconductor Testing, from PCB mount modules with analog control, to rack-mount units with digital control featuring high stability, low ripple, arc and short-circuit protection.
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