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フラットパネル

Spellman High Voltage has been the preferred provider of high voltage power supplies for ion beam implanters used for flat panel display fabrication for over three decades. Spellman’s SL Series from 1kV-360kV @ 10 watts to 2000 watts have outfitted implanters around the world. Special customization allows the units to operate in the extreme environment typical for ion beam implantation. Spellman’s ST Series from 1kV-225kV @ 12kW, with parallel operation allowing powers of 100kW’s or more power the implanters of both today and tomorrow.

UMシリーズ

Power:

4W - 30W

Voltage:

0.062kV - 6kV

MPS

Power:

10W - 10W

Voltage:

1kV - 30kV

UMWシリーズ

Power:

60W - 125W

Voltage:

8kV - 20kV