E-Beam/I-Beam Lithography

SpellmanHV ST 12kW High Voltage Power Supplies (Featured Image)

SERIE ST
  • Models from 1kV to 225kV
  • 12kW Output Parallel Units for Higher Power
  • Single 6U (10.5”) Chassis
  • Remote Analog and Remote Ethernet Interface
  • User Configurable Settings Via Ethernet Interface
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STA 4kW High Voltage Power Supplies (Featured Image)

SERIE STA
  • Models from 1kV to 70kV
  • 3kW Output
  • Single 3U (5.25”) Chassis
  • Remote Analog and Remote Ethernet Interface
  • User Configurable Settings Via Ethernet Interface
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SpellmanHV STR 6kW High Voltage Power Supplies (Featured Image)

SERIE STR
  • Models from 1kV to 150kV
  • 6kW Output
  • Single 6U (10.5”) Chassis
  • Remote Analog and Remote Ethernet Interface
  • Arc and Short Circuit Protected
  • User Configurable Settings Via Ethernet Interface
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SpellmanHV SL Series 10W-1.2kW Rack Mount Power Supply (Featured Image)

SERIE SL
  • Voltage Range from 1kV to 130kV
  • From 10W to 1.2kW
  • Very Compact and Lightweight
  • Extensive Analog and Digital Interface
  • Reversible Polarity Standard up to 8kV
  • Arc Quench/Arc Count/Arc Trip
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SpellmanHV VS100 Electron Beam High Voltage Power Supply

SERIE VS100
  • 100kV Electron Beam High Voltage Power Supply
  • Low/High 10μA/100μA Output Current Selection
  • Less than 75mV of Ripple
  • Excellent Regulation and Stability Performance
  • Oil Free/Solid Encapsulated Design
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FIB
  • Output Voltage 35kV
  • Output Power 1.35W
  • Single Chassis, Multi Output Focused Ion Beam Power Supply
  • High Stability, Very Low Ripple
  • CE Marked & Designed to Meet SEMI S2
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