Litografía por haz de electrones/haz de iones
Electron beam and focused ion beam applications, while quite different, require very specialized high voltage power supplies with similar performance characteristics. The most critical requirements include ultra-low output ripple, excellent regulation, high stability, low temperature coefficients and high accuracy. The task becomes even more challenging since typical e-beam and FIB power supplies consist of a variety of ground based and floating outputs. Spellman has unparalleled experience designing and building products that not only meet these demanding specifications, but that are robust and reliable for long term, trouble free operation.
The Spellman VS100 and FIB Series shown below are representative of the products that we offer for these unique applications. Feel free to contact us to discuss custom requirements or solutions.
- Ga Ion and Plasma Sources FIB Power Supply and Lens
- Accelerator, Filament, Extractor and Suppressor
- Precision Accelerator supply 35kV at 30 µA
- Ground ref. Lens up to 30kV, fixed or reversed polarity
- Multiple Digital Interfaces, Test GUI
- CE Marked & Designed to Meet SEMI S2
- Cold Cathode and Schottky Field Emission SEM
- Accelerator, Filament, Extractor and Suppressor
- Precision Accelerator supply -30kV at 200 µA
- Optical Vacuum Interlock
- Optically Isolated Digital Interface, test GUI
- UL Recognised, CE Marked and RoHS Compliant
- Suministro integrado de tetrodos para emisiones de campo SEM.
- Salidas con rizo muy bajo y ultra estables
- Protección robusta contra arcos y cortocircuitos
- Diseñado para minimizar los eventos de micro descarga
- Interfaz digital RS-232
- GUI gratuita para pruebas y trabajos de desarrollo
- Marcado CE, UKCA y RoHS
- Fuente de alimentación de triodo para SEM termoiónico.
- Fuente de alimentación de alta para precisión para acelerador de -30kV a 170 μA.
- Salidas de filamento, Bias, PMT, centellador y colector.
- Protección contra arcos y cortocircuitos
- Control analógico diferencial
- Reconocido por UL, marcado CE y compatible con RoHS
- Muy compacta y ligera
- Rango de voltaje de 1 kV a 130 kV
- Extensas interfaces analógicas y digitales
- Elevación de polaridad reversible de hasta 8 kV
- Extinción/conteo/desconexión de arco
- Personalización disponible para OEM
- Models from 1kV to 225kV
- 12kW Output Parallel Units for Higher Power
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Chasis completo de 3U (5.25”, 133.35 mm)
- Modelos de 1 kV a 70 kV
- Interfaz remota analógica e interfaz Ethernet
- Configuraciones programables por el usuario a través de la interfaz Ethernet
- Chasis completo de 6U (10.5”, 266.7 mm)
- Modelos de 1 kV a 150 kV
- Interfaz remota analógica e interfaz Ethernet
- Configuraciones programables por el usuario a través de la interfaz Ethernet
- Nanolithography, Micro-optics and Development Mask
- Precision -100kV Output, Ripple < 75mV
- Low/High 10μA/100μA Output Current Selection
- Separate High Voltage Monitor
- Remote Analog Control
- CE Marked and RoHS Compliant
