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Pulverización

While there are many different types of plasma sputtering processes, all with different power supply demands, one of the most important requirements for almost all of them is response to arcing. This is important for stable and consistent sputtering processes. Spellman has many years of experience optimizing our standard rackmount and modular power supplies for use in sputtering, for instance, by limiting stored energy and tailoring arc recovery times. Due to the wide range of requirements for plasma sputtering power supplies, we encourage you to contact our applications experts to discuss your unique specifications.

EVA

Power:

3kW - 12kW

Voltage:

5kV - 10kV

STA

Power:

4kW - 4kW

Voltage:

1kV - 70kV

STR

Power:

6kW - 6kW

Voltage:

1kV - 150kV

ST

Power:

12kW - 120kW

Voltage:

1kV - 225kV