E-Beam/I-Beam Lithography
Electron beam and focused ion beam applications, while quite different, require very specialized high voltage power supplies with similar performance characteristics. The most critical requirements include ultra-low output ripple, excellent regulation, high stability, low temperature coefficients and high accuracy. The task becomes even more challenging since typical e-beam and FIB power supplies consist of a variety of ground based and floating outputs. Spellman has unparalleled experience designing and building products that not only meet these demanding specifications, but that are robust and reliable for long term, trouble free operation.
The Spellman VS100 and FIB Series shown below are representative of the products that we offer for these unique applications. Feel free to contact us to discuss custom requirements or solutions.
- Triode Supply for Thermionic SEM
- Precision Accelerator supply -20kV at 250 µA
- Floating Filament and Bias ref. to Accelerator
- Arc and Short Circuit Protection
- Differential Analog Control
- UL Recognised, CE Marked and RoHS Compliant
- Ga Ion and Plasma Sources FIB Power Supply and Lens
- Accelerator, Filament, Extractor and Suppressor
- Precision Accelerator supply 35kV at 30 µA
- Ground ref. Lens up to 30kV, fixed or reversed polarity
- Multiple Digital Interfaces, Test GUI
- CE Marked & Designed to Meet SEMI S2
- Output Voltage from 1kV to 130kV
- Output Power from 10W to 1.2kW
- Very Compact and Lightweight
- Extensive Analog and Digital Interface
- Reversible Polarity Standard up to 8kV
- Arc Quench/Arc Count/Arc Trip
- Output Voltage 1kV - 130kV
- Output Power 10 W-1.2 kW
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 70kV
- Output Power 4 kW
- Single 3U (5.25”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 150kV
- Output Power 6kW
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- Arc and Short Circuit Protected
- User Configurable Settings Via Ethernet Interface
- Nanolithography, Micro-optics and Development Mask
- Precision -100kV Output, Ripple < 75mV
- Low/High 10μA/100μA Output Current Selection
- Separate High Voltage Monitor
- Remote Analog Control
- CE Marked and RoHS Compliant
