E-Beam/I-Beam Lithography

SpellmanHV ST 12kW High Voltage Power Supplies (Featured Image)

ST Series
  • Output Voltage 1kV - 130kV
  • Output Power 10 W-1.2 kW
  • Single 6U (10.5”) Chassis
  • Remote Analog and Remote Ethernet Interface
  • User Configurable Settings Via Ethernet Interface
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STA 4kW High Voltage Power Supplies (Featured Image)

STA Series
  • Output Voltages from 1kV to 70kV
  • Output Power 4 kW
  • Single 3U (5.25”) Chassis
  • Remote Analog and Remote Ethernet Interface
  • User Configurable Settings Via Ethernet Interface
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SpellmanHV STR 6kW High Voltage Power Supplies (Featured Image)

STR Series
  • Output Voltages from 1kV to 150kV
  • Output Power 6kW
  • Single 6U (10.5”) Chassis
  • Remote Analog and Remote Ethernet Interface
  • Arc and Short Circuit Protected
  • User Configurable Settings Via Ethernet Interface
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SpellmanHV SL Series 10W-1.2kW Rack Mount Power Supply (Featured Image)

SL Series
  • Output Voltage from 1kV to 130kV
  • Output Power from 10W to 1.2kW
  • Very Compact and Lightweight
  • Extensive Analog and Digital Interface
  • Reversible Polarity Standard up to 8kV
  • Arc Quench/Arc Count/Arc Trip
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SpellmanHV VS100 Electron Beam High Voltage Power Supply

VS100
  • Output Voltage 100kV
  • Output Power 10W
  • Low/High 10μA/100μA Output Current Selection
  • Less than 75mV of Ripple
  • Excellent Regulation and Stability Performance
  • Oil Free/Solid Encapsulated Design
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FIB Series

FIB
  • Output Voltage 35kV
  • Output Power 1.35W
  • Single Chassis, Multi Output Focused Ion Beam Power Supply
  • High Stability, Very Low Ripple
  • CE Marked & Designed to Meet SEMI S2
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