E-Beam/I-Beam Lithography

Electron beam and focused ion beam applications, while quite different, require very specialized high voltage power supplies with similar performance characteristics. The most critical requirements include ultra-low output ripple, excellent regulation, high stability, low temperature coefficients and high accuracy. The task becomes even more challenging since typical e-beam and FIB power supplies consist of a variety of ground based and floating outputs. Spellman has unparalleled experience designing and building products that not only meet these demanding specifications, but that are robust and reliable for long term, trouble free operation. 

The Spellman VS100 and FIB Series shown below are representative of the products that we offer for these unique applications. Feel free to contact us to discuss custom requirements or solutions.