E-Beam/I-Beam Lithography
- Output Voltage 1kV - 130kV
- Output Power 10 W-1.2 kW
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 70kV
- Output Power 4 kW
- Single 3U (5.25”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Output Voltages from 1kV to 150kV
- Output Power 6kW
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- Arc and Short Circuit Protected
- User Configurable Settings Via Ethernet Interface
- Output Voltage from 1kV to 130kV
- Output Power from 10W to 1.2kW
- Very Compact and Lightweight
- Extensive Analog and Digital Interface
- Reversible Polarity Standard up to 8kV
- Arc Quench/Arc Count/Arc Trip
- Output Voltage 100kV
- Output Power 10W
- Low/High 10μA/100μA Output Current Selection
- Less than 75mV of Ripple
- Excellent Regulation and Stability Performance
- Oil Free/Solid Encapsulated Design
- Output Voltage 35kV
- Output Power 1.35W
- Single Chassis, Multi Output Focused Ion Beam Power Supply
- High Stability, Very Low Ripple
- CE Marked & Designed to Meet SEMI S2
