電子ビーム/イオンビームリソグラフィー
- Models from 1kV to 150kV
- 12kW Output Parallel Units for Higher Power
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Models from 1kV to 70kV
- 3kW Output
- Single 3U (5.25”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Models from 1kV to 150kV
- 6kW Output
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- Arc and Short Circuit Protected
- User Configurable Settings Via Ethernet Interface
- Voltage Range from 1kV to 130kV
- From 10W to 1.2kW
- Very Compact and Lightweight
- Extensive Analog and Digital Interface
- Reversible Polarity Standard up to 8kV
- Arc Quench/Arc Count/Arc Trip
- 100kV Electron Beam High Voltage Power Supply
- Low/High 10μA/100μA Output Current Selection
- Less than 75mV of Ripple
- Excellent Regulation and Stability Performance
- Oil Free/Solid Encapsulated Design
- Output Voltage 35kV
- Output Power 1.35W
- Single Chassis, Multi Output Focused Ion Beam Power Supply
- High Stability, Very Low Ripple
- CE Marked & Designed to Meet SEMI S2
- 電子ビームカラム用の三極管供給
- 高精度、低ノイズ、高安定性
- 過電流/過電圧保護
- アークおよび短絡保護
- OEMのカスタマイズ可能
- UL適合設計、CEおよびRoHS準拠
