
EBM20N5/24
- Triode Supply for Electron Beam Columns
- High Precision, Low Noise, Ultra Stable
- Over Current/Voltage Protection
- Arc and Short Circuit Protection
- OEM Customization Available
- CE and RoHS Compliant, Designed to Meet UL
*Note: All specifications are subject to change without notice. Please consult the English PDF version of this datasheet for the most up-to-date revision.
OEM Module for SEM Applications
The EBM20N5/24 powers E-Beam Columns in Thermionic Scanning Electron Microscopes providing acceleration, bias and filament sources in a single compact package. Spellman’s proprietary HV packaging and encapsulation technology gives dramatic improvements in size, cost and performance compared to other SEM power supply offerings. The EBM20N5/24 provides a highly regulated, low noise, ultra stable accelerator supply programmable from 0 to -20kV at 250uA. The EBM20 has floating bias and filament supplies referenced to the accelerator. Programming signals utilize differential analog inputs to minimize external noise and offset voltages effects. A ground referenced accelerator current monitor is provided. The EBM20 is arc and short circuit immune, along with over voltage and over current protection.
Typical applications:
- Scanning Electron Microscope
Specifications
(Ref. 128031-001 REV. B)
SPECIFICAATIONS:
Input Voltage:
+24Vdc, ±5%, 1.5A maximum
High Voltage Outputs:
ACCELERATOR:
Voltage:
0V to -20kV full load with respect to ground
Current:
250μA maximum (including feedback current), continuous
from -500V to -20kV.
Current Trip Level:
275mA, ±10%. Trips off all outputs, reset by cycling
i nput power
Accuracy (voltage program):
±1% from -500V to -20kV
Load Regulation:
<±100ppm, 20μA to 250μA load change
Line Regulation:
<±100ppm for 10% line change
Ripple:
<20ppm p-p at -20kV, 250μA, maximum bias and filament output
Temperature Coefficient:
<100ppm/°C
Stability:
30ppm/3 minutes at 100μA load current after 1 hour warm up
Rise Time (switch ON):
<3 seconds (10% to 90%) with no overshoot
Fall Time (switch OFF):
<100 seconds (to <50 volts)
BIAS:
(Referenced to Accelerator)
Voltage:
0 to +1.5kV (max allowable output limited to 2kV)
Current:
150µA maximum
Accuracy (voltage program):
±3% of full scale
Line Regulation:
<±0.1% for 10% line change
Ripple:
<0.1% p-p
Temperature Coefficient:
<1000ppm/°C
Stability:
1%/10 minutes
Rise Time (switch ON):
<3 seconds (10% to 90%) with no overshoot
Fall Time (switch OFF):
<100 seconds (to <50 volts)
FILAMENT:
(center voltage WRT accelerator output)
Power:
0 to 12W
Load Resistance:
1.33Ω ±5%
Accuracy:
±3% of FS
Load Regulation:
<1% for 10% change in load resistance
Line Regulation:
<1% for 10% line voltage change
Ripple:
<0.1% p-p max
Temperature Coefficient:
<300ppm/°C
Stability:
100ppm/10 minutes
INTERFACE:
Input:
Analog control for accelerator, filament and bias
High Voltage Output:
Custom 3 pin receptacle and cable assembly
Temperature:
Operating: 5°C to +40°C
Storage: -20°C to +50°C
Humidity:
20% to 85% RH, non-condensing
Dimensions:
10.63˝H x 2.36˝W x 7.87˝D (270mm x 60mm x 200mm) excluding any mounting brackets
Weight:
<10 lbs. (4.5kg)
Regulatory Approvals:
The unit is designed to meet the requirements of EN61010, UL61010-1 and CAN CSA22.2 No. 61010. As the unit is a component within a system, it will not tested as a stand-alone unit to meet the EMC directive. The user will need to follow sensible EMC precautions in using the unit. RoHS compliant.
POWER INPUT CONNECTOR 3 PIN JST MODEL B 3PS-VH
Pin | Signal | Parameters |
---|---|---|
1 | +24V High Voltage Power Input | +24Vdc Input |
2 | 0V Input | +24Vdc Common |
3 | FG | Chassis Ground |
CONTROL AND MONITORING CONNECTOR 10PIN JST MODEL S10B-EH
Pin | Signal | Parameters |
---|---|---|
1 | FIL PROG (+) | Filament Program (+) Input |
2 | GND | Ground |
3 | BIAS (+) | Bias (+) Input |
4 | GND | Ground |
5 | ACC PROG (+) | Acc Voltage Program (+) Input |
6 | GND | Ground |
7 | EMS | Emission Current Monitor Output |
8 | GND | Ground |
9 | ACC MON | ACC Voltage Monitor Output |
10 | GND | Ground |
How to order: | ||
---|---|---|
Standard: PART NO.:EBM20N4/24 | ||
HV Cable: PART NO.:HVC30/3IS/LL1650 (1.65m Cable) |
Tables & Diagrams
HV CABLE ASSEMBLY DETAILS
DIMENSIONS: in.[mm]
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