CSEAC 2026

Today's complex semiconductor manufacturing processes require a variety of high voltage power solutions, most with extremely demanding specifications. Spellman products are used throughout the fab, from essentially the beginning of a wafer's journey to the end. Starting with lithography - powering light sources- to electrostatic wafer clamping to inspecting and testing devices, our precise, low noise, highly stable power supplies are, indeed, an enabling technology.

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MPS Series

  • Differential Input for Voltage Program
  • Optional RS-232/RS-485 Control
  • Voltage and Current Monitors and Controls
  • High Stability, Ultra Low Ripple and Noise
  • CE Marked and UL61010-1 Certified

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MPS20W Series

  • Differential Input for Voltage Program
  • Voltage and Current Controls
  • Voltage and Current Monitors
  • High Stability
  • Ultra Low Ripple and Noise
  • High Voltage Enable Control

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EBM20N5-24 Series

  • Triode Supply for Electron Beam Columns
  • High Precision, Low Noise, Ultra Stable
  • Over Current/Voltage Protection
  • Arc and Short Circuit Protection
  • OEM Customization Available
  • UL Certified, CE Marked and RoHS Compliant

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MPD Series

  • Extremely Compact 10W High Performance Module
  • Multiple Control Interfaces: Differential Analog, RS-232 and RS-485
  • Voltage and Current Monitors
  • High Stability, Low TC
  • Ultra Low Ripple and Noise, Down to 1/f Band
  • Free GUI for Testing and Development Work
  • Digital Control Features: Multiple Units Operation, Current Control, Status Flags and Wobbler Function

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MSC2.5PN7.5 Series

  • Specifically Designed for E-Chuck Applications
  • Two Reversible Outputs of Opposite Polarity
  • Rated 2.5kV 3mA. Amplitudes are Set Independently
  • Automatic User Configurable De-chucking Function
  • Front Panel Control via Buttons and LCD Display
  • RS-232, RS-485 and Ethernet Interface
  • Free GUI for Testing and Development Work

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SL Series

  • Very Compact and Lightweight
  • Voltage Range from 1kV to 130kV
  • Extensive Analog and Digital Interface
  • Reversible Polarity Standard up to 8kV
  • Front Panel Control via Buttons and LCD Display
  • Arc Quench/Arc Count/Arc Trip
  • OEM Customization Available

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ST Series

  • Single 6U (10.5”) Chassis
  • Models from 1kV to 225kV
  • Remote Analog and Remote Ethernet Interface
  • Parallel Units for >100kW’s
  • User Configurable Settings Via Ethernet Interface

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