EBM-FEG
- Integrated Tetrode Supply for Field Emission SEM
- Very Low Ripple and Ultra Stable Outputs
- Robust Arc and Short Circuit Protection
- Designed to Minimize Micro-discharge Events
- Optically Isolated Digital Interface
- Free GUI for Testing and Development Work
- UL Recognized, CE Marked & Designed to Meet SEMI S2
Certifications & Compliance
OEM Module For SEM Applications
Spellman’s EBM-FEG Series is an integrated, multiple output high voltage power supply specifically designed to drive Scanning Electron Microscope (SEM) Columns. Spellman’s extensive applications knowledge has enabled us to develop a range of technology platforms that can be customized to meet the demanding requirements of SEM.
The main Acceleration Voltage is a high stability 30kV supply, with integrated floating Filament, Extractor and Suppressor outputs required to drive Field Emission, Cold Cathode and Schottky Electron Sources in a compact solution with extenders to mount in a 19˝ rack. All outputs are offered with ultra-low output ripple, minimal microdischarge, excellent regulation, stability, temperature coefficient and accuracy specifications for unprecedented image quality and resolution. Isolation and control of the respective floating sources is provided via Spellman’s proprietary high voltage isolation techniques
Customer control of this integrated EBM-FEG power supply system is accomplished via a fiber optic RS-232 interface. All high voltage safety interlocks are of a fail safe hardware based design. The unit is UL and CE marked and is designed to be compliant with SEMI standards.
- 사양
- 모델
- 주문 방법
- 다운로드
사양
(Ref. 128136-001 REV. C)
- Input Voltage:
+24Vdc, ±5% @ 4 amps maximum. Inrush is <6 amps for 1 second. - Vacuum Interlock:
The vacuum interlock is an optical interlock which is made when light is present on the fiber. When no light is present the interlock is broken and the unit disables all of the outputs. - Weight:
44 lbs. (20kg) - Dimensions:
5.25” H x 13.75” W x 14.20”D (133mm x 349mm x 361mm) - Regulatory Approvals:
Compliant to EEC Low Voltage Directive. UL/CUL recognized, File E354595. RoHS Compliant.
OUTPUT SPECIFICATIONS
| OUTPUT | Beam Energy | Filament | Suppressor | Extractor |
|---|---|---|---|---|
| Output Voltage | -20V to -30kV referenced to ground. | nominal 1.8V max 3V referenced to Beam Energy | -100V to -1kV referenced to Beam Energy | 100V to 10kV referenced to Beam Energy |
| Output current - max | 200μA | 3A | 100μA | 700μA |
| Accuracy | <1% or ±10V (whichever is greater) | ±5mA (between 2A to 3A) | <2% or ±6V (whichever is greater) | <1% or ±20V (whichever is greater) |
| Linearity | <± 25V | ±10mA (between 0.5A to 3A) | ±5V | ±20V |
| Load Regulation | <±100mV for 30μA to 200μA | <5mA for 0.4Ω to 1Ω change at 3A | <120mV for 10μA to 100μA | <100mV at 40μA 0.1Hz to 20MHz, <1V at 10 - 700μA |
| Line Regulation for a ± 5% line change | <10ppm | <1mA | <5ppm | <5ppm |
| Ripple p-p at max. output | <50mVp-p 0.1Hz to 20MHz | <1mAp-p 20Hz to 10kHz <30mVp-p at approx 100kHz | <20mVp-p at 0.1Hz to 20MHz | <100mV p-p at 0.1Hz to 20MHz |
| Temperature Coefficient | <5 ppm/°C from 20°C to 30°C, <10 ppm/°C otherwise | <50 ppm/°C | <50 ppm/°C | <25 ppm/°C |
| Stability (1h warm up) | 200mV/15min | <0.5mA/60min | <0.3V/15min | <0.3V/15min |
모델
주문 방법
HOW TO ORDER
| Description | Part Number |
|---|---|
| EBM-FEG | EBM30N6/FEG |
| Optical to RS-232 Communication Kit | EBMKFEG |
| Optical to RS-232 Converter (included in the above kit) | 21777 |
| HV Output Cable - 1.5 meters | HVC30/4ISO/1201 |
| HV Output Cable - 2.8 meters | HVC30/4ISO/1197 |
다운로드
Typical Applications:
- Scanning Electron Microscopes (SEM)
- Electron Beam Controller
스펠만 고전압 뉴스레터를 구독하세요
분기마다 발행되는 스펠만 고전압 뉴스레터를 구독하세요. 고전압전원장치에 대한 기술 정보와 최신 업계동향을 전달하여 드립니다.