EBM20

  • Triode Supply for Electron Beam Columns
  • High Precision, Low Noise, Ultra Stable
  • Over Current/Voltage Protection
  • Arc and Short Circuit Protection
  • OEM Customization Available
  • CE and RoHS Compliant, Designed to Meet UL

*Note: All specifications are subject to change without notice. Please consult the English PDF version of this datasheet for the most up-to-date revision.

2 Year Extended Warranty CE, ROHS, UL Marking

OEM Module for SEM Applications

The EBM20 powers E-Beam Columns in Thermionic Scanning Electron Microscopes providing acceleration, bias and filament sources in a single compact package. Spellman’s proprietary HV packaging and encapsulation technology gives dramatic improvements in size, cost and performance compared to other SEM power supply offerings. The EBM20 provides a highly regulated, low noise, ultra stable accelerator supply programmable from 0 to -20kV at 200uA. The EBM20 has floating bias and filament supplies referenced to the accelerator. Programming signals utilize differential analog inputs to minimize external noise and offset voltages effects. A ground referenced accelerator current monitor is provided. The EBM20 is arc and short circuit immune, along with over voltage and over current protection.

Typical applications:

  • Scanning Electron Microscope

Specifications

(Ref. 128031-001 REV. A)

Input Voltage:

+24Vdc, ±5%, 1.5A maximum

High Voltage Outputs:

ACCELERATOR:

Voltage:

0V to -20kV full load with respect to ground

Current:

200μA maximum, continuous from -500V to -20kV

Accuracy:

±1% from -500V to -20kV

Load Regulation:

<±100ppm, 20μA to 200μA load change

Line Regulation:

<±100ppm for 10% line change

Ripple:

<30ppm p-p at -20kV, 200μA, maximum bias and filament output

Temperature Coefficient:

<100ppm/°C

Stability:

30ppm/3 minutes at 100μA load current after 1 hour warm up

BIAS:

(Referenced to Accelerator)

Voltage:

0 to +1.5kV (max allowable output limited to 2kV)

Current:

150µA maximum

Accuracy:

±3% of full scale

Line Regulation:

<±0.1% for 10% line change

Ripple:

<0.1% p-p

Temperature Coefficient:

<1000ppm/°C

Stability:

1%/10 minutes

FILAMENT:

(Referenced to Accelerator)

Power:

0 to 12W

Load Resistance:

1Ω ±5%

Accuracy:

±3% of FS

Load Regulation:

<1% for 10% change in load resistance

Line Regulation:

<1% for 10% line change

Ripple:

<0.1% p-p max

Temperature Coefficient:

<300ppm/°C

Stability:

100ppm/10 minutes

INTERFACE:

Input:

Analog control for accelerator, filament and bias

Output:

Custom 3 pin receptacle and cable assembly

Temperature:

Operating: 5°C to +40°C

Storage: -20°C to +50°C

Humidity:

20% to 85% RH, non-condensing

Dimensions:

10.63˝H x 2.36˝W x 7.87˝D (270mm x 60mm x 200mm) excluding any mounting brackets

Weight:

<10 lbs. (4.5kg)

Regulatory Approvals:

The unit is CE marked against EN61010:2010 safety requirements for electrical equipment for measurement, control and laboratory use and is RoHS compliant.

The unit is designed to meet: UL61010-1:2012 safety requirements for electrical equipment for measurement, control, and laboratory use - Part 1: general requirements and CAN/CSA-C22.2 No.61010-1-12:2015.

POWER INPUT CONNECTOR 3 PIN JST MODEL B 3PS-VH

Pin Signal Parameters
1 +24V High Voltage Power Input +24Vdc Input
2 0V Input +24Vdc Common
3 FG Chassis Ground
 

CONTROL AND MONITORING CONNECTOR 10PIN JST MODEL S10B-EH

Pin Signal Parameters
1 FIL PROG (+) Filament Program (+) Input
2 FIL PROG (-) Filament Program (-) Input
3 BIAS (+) Bias (+) Input
4 BIAS (-) Bias (-) Input
5 ACC PROG (+) Acc Voltage Program (+) Input
6 ACC PROG (-) Acc Voltage Program (-) Input
7 EMS Emission Current Monitor Output
8 EMS GND Emission Current Monitor Gnd (0V)
9 ACC MON ACC Voltage Monitor Output
10  ACC MON GND  ACC Voltage Monitor GND (0V) 

 

How to order:
Standard: PART NO.:EBM20N4/24
HV Cable: PART NO.:HVC30/3IS/LL1650 (1.65m Cable)

Tables & Diagrams

HV CABLE ASSEMBLY DETAILS

EBM20 Series

EBM20 Series

DIMENSIONS: in.[mm]

SIDE VIEW

EBM20 Series

TOP VIEW

EBM20 Series

FRONT VIEW

EBM20 Series

SIDE VIEW

EBM20 Series