CSEAC 2025
Today's complex semiconductor manufacturing processes require a variety of high voltage power solutions, most with extremely demanding specifications. Spellman products are used throughout the fab, from essentially the beginning of a wafer's journey to the end. Starting with lithography - powering light sources- to electrostatic wafer clamping to inspecting and testing devices, our precise, low noise, highly stable power supplies are, indeed, an enabling technology.
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MPS Series
- Differential Input for Voltage Program
- Optional RS-232/RS-485 Control
- Voltage and Current Monitors and Controls
- High Stability, Ultra Low Ripple and Noise
- CE Marked and UL61010-1 Certified
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MPS20W Series
- Differential Input for Voltage Program
- Voltage and Current Controls
- Voltage and Current Monitors
- High Stability
- Ultra Low Ripple and Noise
- High Voltage Enable Control
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EBM20N5-24 Series
- Triode Supply for Electron Beam Columns
- High Precision, Low Noise, Ultra Stable
- Over Current/Voltage Protection
- Arc and Short Circuit Protection
- OEM Customization Available
- UL Certified, CE Marked and RoHS Compliant
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MPD Series
- Extremely Compact 10W High Performance Module
- Multiple Control Interfaces: Differential Analog, RS-232 and RS-485
- Voltage and Current Monitors
- High Stability, Low TC
- Ultra Low Ripple and Noise, Down to 1/f Band
- Free GUI for Testing and Development Work
- Digital Control Features: Multiple Units Operation, Current Control, Status Flags and Wobbler Function
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MSC2.5PN7.5 Series
- Specifically Designed for E-Chuck Applications
- Two Reversible Outputs of Opposite Polarity
- Rated 2.5kV 3mA. Amplitudes are Set Independently
- Automatic User Configurable De-chucking Function
- Front Panel Control via Buttons and LCD Display
- RS-232, RS-485 and Ethernet Interface
- Free GUI for Testing and Development Work
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SL Series
- Very Compact and Lightweight
- Voltage Range from 1kV to 130kV
- Extensive Analog and Digital Interface
- Reversible Polarity Standard up to 8kV
- Front Panel Control via Buttons and LCD Display
- Arc Quench/Arc Count/Arc Trip
- OEM Customization Available
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ST Series
- Single 6U (10.5”) Chassis
- Models from 1kV to 225kV
- Remote Analog and Remote Ethernet Interface
- Parallel Units for >100kW’s
- User Configurable Settings Via Ethernet Interface
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2025 Product Catalog
Spellman’s High Voltage Power Supply Catalog features a complete listing of all standard Modules, X-Ray Sources, Rack, X-Ray Generator and Application Specific Products.
2024 High Voltage Reference Manual
We compiled all of our useful FAQ’s, application notes, articles, technical papers and three glossaries into a single handy reference guide.Contact
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Spellman High Voltage Electronics Corporation is the world’s leading high voltage power supply, X-Ray generator and Monoblock® X-Ray source manufacturer.
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