EVA 시리즈

  • Designed for E Beam Coating Applications
  • 3kW, 6kW and 12kW Power Levels
  • Remote Analog and Ethernet/RS-232 Interface
  • Fast, User Configurable Dynamic Arc Intervention
  • Optional Filament Gun Supply (up to 3 channels)

전자빔 증착 고전압 전원 공급 장치

Spellman’s new EVA Series is specifically designed for demanding electron beam coating applications. A full featured front panel provides local control, while an extensive analog interface allows remote capability. The included Ethernet and RS-232 digital interfaces simplify integrating the EVA into your system design.

The EVA’s robust IGBT inverter design is inherently fault tolerant. The proprietary low capacitance, low stored energy high voltage output section is ideal for dynamic load and fault conditions encountered in coating applications. Fast arc recovery times (<2ms) minimize process interruptions. Many operational parameters can be configured by the user to suit their particular requirements

An optional filament gun supply is available. The EVA can support one, two or three filament gun supply channels providing unprecedented flexibility and cost effectiveness.

사양

(Ref. 128106-001 REV. D)

3/6/12KW HV SPECIFICATIONS

Input Voltage: (must be specified at time of order)

Option 3PH: 180-264Vac, 50/60Hz, three phase, 90% efficiency, 0.85 power factor

Option 1PH: 180-264Vac 50/60Hz, single phase, 90% efficiency, 0.65 power factor (3kW & 6kW only)

Option 400VAC: 360-528Vac 50/60Hz, three phase, 90% efficiency, 0.85 power factor (6kW & 12kW only)

Input Current:

Option 3PH: 180-264Vac, 50/60Hz, three phase

3kW—13 amps, maximum

6kW—25 amps, maximum

12kW—50 amps, maximum

Option 1PH: 180-264Vac, 50/60Hz, single phase

3kW—29 amps, maximum

6kW—57 amps, maximum

Option 400VAC: 360-528Vac, 50/60 Hz, three phase,

6kW—13 amps, maximum

12kW—25 amps, maximum

Output Voltage:

5kV @ 600mA, negative polarity. 3kW maximum.

10kV @ 600mA, negative polarity. 6kW maximum.

10kV @ 1200mA, negative polarity. 12kW maximum.

Local Output Controls:

Voltage is continuously adjustable over entire range via a 10 turn potentiometer.

Voltage Regulation:

Load: 0.05% of full voltage +500mV for full load change.

Line: 0.05%of full voltage +500mV over specified input range.

Ripple:

<3% Vrms 

Stability:

0.02%hr. after 1 hour warm-up.

Temperature Coefficient:

100ppm/°C.

Environmental:

Temperature Range:

Operating: 0°C to 40°C

Storage: -40°C to 85°C

Humidity:

10% to 90% RH, non-condensing.

Cooling:

Forced air; inlet through side panels, outlet at rear panel

Metering:

Front panel digital voltage and current meters, 3.5 digit, accurate to within 1%.

3/6/12KW HV SPECIFICATIONS

System Status Display:

“Dead Front” type indicators provide status of up to 12 system parameters including voltage regulation, fault conditions and circuit control.

Input Power Connector:

A 6 foot (1.8 meter) long captive line cord will be provided.

Analog Interface Connector:

50 pin female D connector

High Voltage Output Cable:

10 ft (3.05m) shielded high voltage cable, removable at rear panel.

Dimensions:

3kW/6kW Units: 5.25”(3U)H x 19” W x 21” D (133mm x 482mm x 533mm)

12kW Units: 10.5”(6U)H x 19” W x 21” D (266mm x 482mm x 533mm)

Weight:

3kW/6kW Units: 46 pounds (20.87kg)

12kW Units: 90 pounds (40.82kg)

Regulatory Approvals:

2004/108/EC, the EMC Directive and 2006/95/EC, the Low Voltage Directive, approval pending.

Digital Interface

The EVA features a standard RS-232 and Ethernet digital interface, simplifying power supply communication require­ments saving the user time and money, while enhancing functionality and overall capability. Spellman provides a GUI allowing customization of operational features while also providing basic power supply functionality and control via a sample simulated front panel.

Arc Intervention

Spellman’s EVA power supplies sense arc events via a fast acting current sense transformer. The arc intervention cir­cuitry prevents power supply damage from continuous, long term arcing. Customers can change arc intervention para­meters (Arc Count, Arc Quench, Reramp Time, and Window Time) within preset limits via the provided GUI. Customized units can be configured for unique arc prone environments, contact Spellman for details.

Additional High Voltage Output Connectors

Spellman’s EVA is designed to provide 1, 2 or 3 parallel configured high voltage output connectors. The standard unit provides one high voltage output connector. If you intend to use the EVA in a multi channel application but want to utilize your own filament power supply, this factory installed option provides the additional high voltage con­nections required. Hardware Option HV2 provides two high voltage output connectors, while Hardware Option HV3 pro-vides three high voltage output connectors.

Multiple beam control units can be provided, allowing 1, 2 or 3 separate electron guns to be independently operated.

Each beam control unit consists of a beam controller and a gun output box. The beam controller is a 1U rack-mounted chassis containing the filament power, control and emission regulation circuitry. The gun output box contains the high frequency filament transformer which is referenced to the high voltage output potential. This box should be mounted close to the electron gun to minimize the length of the high current filament connections. The box also contains electron gun emission current monitoring circuitry and provides a feedback signal used to regulate the electron gun emission current.

Each beam control channel, if operated alone, can utilize 0 to 100% of the rated emission current capacity. When two or three beam control channels are used at the same time, the total system emission current capacity remains the same. Individual channel programming must be done such that the total current does not exceed the system’s total emission current available.

Optional Beam Controller (Filament Power Supply) and Gun Output Box

Beam Controller 1.75. (1U) Chassis

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 3)

Gun Output Box

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 4)

BEAM CONTROLLER SPECIFICATIONS

Input Voltage:

180-264 Vac, 50/60Hz, single phase, 7.5 amps maximum

Output Voltage/Current:

0-12Vrms at ˜ 30kHz, 0-35 amps. An optional 50 amp filament (HPF) is available.

Metering:

Front panel digital filament current and emission current meters, 3.5 digit, accurate to within 1%.

System Status Display:

“Dead Front” type indicators provide status of up to 12 system operations including voltage regulation, fault conditions and circuit control.

Input Power Connector:

A 6 foot (1.8 m) long IEC320 Cord Set will be provided.

Analog Interface Connector:

Male 25 pin D connector

Filament Output Connections: (gun drive cable)

The secondary leads of the filament power transformer exiting the gun output box are 36” (91.44cm) long. The cover of this box is interlocked for safety purposes.

Environmental:

Temperature Range:

Operating: 0°C to 40°C

Storage: -40°C to 85°C

Humidity:

10% to 90% RH, non-condensing.

Cooling:

Forced air; inlet through side panels, outlet at rear panel.

Dimensions:

Beam Controller:

1.75”H (1U) x 15” W x 19”D (4.45 x 48.3 X 38.1cm)

Gun Output Box:

4”H x 6.25”W x 10”D (10.2 x 15.9 x 25.4cm)

Weight:

Beam Controller:

18 pounds (8.1kg)

Gun Output Box:

6 pounds (2.7kg)

HARDWARE BASED OPTIONS

3PH - 180-264Vac Three Phase Input

1PH - 180-264Vac Single Phase Input (3kW & 6kW only)

400VAC - 360-528Vac, Three Phase Input (12kW only)

LL(X) - High Voltage Cable Length

HV2 - Two High Voltage Output Connectors

HV3 - Three High Voltage Output Connectors

FIL1 - Filament Gun Supply—One Channel

FIL2 - Filament Gun Supply—Two Channels

FIL3 - Filament Gun Supply—Three Channels

HPF - 50 Amp Filament Supply

SOFTWARE CONFIGURABLE FEATURES

Adjustable Overload Trip

Arc Trip Count

Arc Quench Time

Arc Reramp Time

Arc Window Time

HV POWER SUPPLY INTERFACE— 50 PIN FEMALE D CONNECTOR

Pin Signal Parameters
1 Power Supply Common Power Supply Ground
2 Reset/HV Inhibit Normally open, Low = Reset/Inhibit
3 External Interlock +24Vdc @ open, <25mA @ closed
4 External Interlock Return Return for External Interlock
5 mA Test Point 0-10Vdc = 0-100% rated output, Zout= 1KΩ, 1%
6 kV Test Point 0-10Vdc = 0-100% rated output, Zout= 1KΩ, 1%
7 +10Vdc Reference Output +10Vdc @ 1mA
8 mA Program Input 0-10Vdc = 0-100% rated output, Zin>10MΩ
9 Local mA Program Output 0-10Vdc = 0-100% rated output, front panel pot
10 kV Program Input 0-10Vdc = 0-100% rated output, Zin>10MΩ
11 Local kV Program Output 0-10Vdc = 0-100% rated output, front panel pot
12 Remote Power On Output +24Vdc @ open, <25mA @ closed
13 Remote Power On Return Return for Remote Power On
14 Remote HV Off  +24Vdc @ open, <25mA @ closed, connect to
pin15 for front panel operation
15 Remote HV Off/On Common HV On/Off Common
16 Remote HV On +24Vdc @ open, <25mA @ closed, momentarily
connect to pin 15 enable high voltage
17 HV Off Indicator +24Vdc @ 25mA = HV Off
18 HV On Indicator +24Vdc @ 25mA = HV On
19 Power Supply Common Supply Ground
20 +24Vdc Output +24Vdc @ 100mA, maximum
21 Voltage Mode Status Open Collector, Low = Active
22 Current Mode Status Open Collector, Low = Active
23 Spare
24 Interlock Closed Status Open Collector, Low = Active
25 Spare
26 Spare  
27 Spare  
28 Remote Overvoltage Ad 0-10Vdc = 0-100% rated output
29 Spare
30 Over Voltage Fault Open Collector, Low = Active
31 Over Current Fault Open Collector, Low = Active
32 System Fault Open Collector, Low = Active
33 RGLT Error Fault Open Collector, Low = Active
34 Arc Open Collector, Low = Active
35 Over Temp Fault Open Collector, Low = Active
36 AC Fault Open Collector, Low = Active
37 Spare  
38 Spare  
39 Spare  
40 Spare  
41 Spare  
42 Spare
43 Spare
44 +5Vdc Output +5Vdc @ 100mA, maximum
45 +15Vdc Output +15Vdc @ 100mA, maximum
46 -15Vdc Output -15Vdc @ 10mA, maximum
47 RS232 Tx  
48 RS232 Rx  
49 RS232 GND  
50 Power Supply Common Power Supply Ground

BEAM CONTROLLER INTERFACE— 25 PIN FEMALE D CONNECTOR

Pin Signal Signal Parameters
1 Power Supply Common Signal Ground
2 Spare  
3 External Interlock +15Vdc at Open, <15mA @ Closed
4 External Interlock Return Return for Interlock
5 Filament Current Test Point 0 to 10Vdc = 0 to 100% rated output
6 Beam Current Test Point 0 to 10Vdc = 0 to 100% rated output
7 +10Vdc Reference +10Vdc, 1mA Max
8 Filament Limit Program Input 0 to 10Vdc = 0 to 100% rated output
9 Local Filament Limit Program Front panel potentiometer wiper
10 Beam Current Program Input 0 to 10Vdc = 0 to 100% rated output
11 Local Beam Current Program Front panel potentiometer wiper
12 Filament Preheat Program In 0 to 10Vdc = 0 to 100% rated output
13 Local Fil. Preheat Program Internal potentiometer
14 Beam Off +15Vdc at Open, <25mA @ Closed
Connect together for FP operation
15 Beam On/Off Common +15Vdc at Open, <25mA @ Closed
Connect together for FP operation
16 Beam On Momentarily connect to pin 15 = Beam On
17 Remote Beam Off Indicator 0=Beam On, +15V, 10mA Max=Beam Off
18 Remote Beam On Indicator 0=Beam Off, +15V, 10mA Max=Beam On
19 Spare  
20 Spare  
21 Spare  
22 Remote PS Fault 0 = Fault, +15Vdc @ 0.1mA = No Fault
23 Spare  
24 Power Supply Common Signal Ground
25 Shield Return Chassis Ground

테이블 및 다이어그램

DIMENSIONS: in.[mm]

3U 6kW Power Supply

FRONT VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 10)

TOP VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 11)

BACK VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 12)

DIMENSIONS: in.[mm]

6U 12kW Power Supply

FRONT VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 13)

TOP VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 14)

BACK VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 15)

DIMENSIONS: in.[mm]

Beam Controller

FRONT VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 16)

TOP VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 18)

BACK VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 20)

DIMENSIONS: in.[mm]

Gun Output Box

FRONT VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 17)

TOP VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 19)

BACK VIEW

EVA 전자빔 증착 고전압 전원 공급 장치 (Image 21)

Note: All specifications are subject to change without notice. Please consult the PDF version of this datasheet for the most up-to-date revision.