EBM-TEG
- Triode Supply for Thermionic Emission SEM
- High Precision, Low Noise, Ultra Stable
- Over Current/Voltage Protection
- OEM Customization Available
- UL, CE and RoHS Compliant
Certifications & Compliance
Triode Supply for Thermionic SEM
The EBM30N/TEG is an integral solution that provides the high voltage required by Thermionic Emission Scanning Electron Microscope (SEM). Spellman’s proprietary packaging and encapsulation technology gives dramatic improvements in size, cost and performance compared to other SEM power supply offerings.
This unit provides a highly regulated, low noise, ultra-stable Accelerator supply programmable from 0 to -30kV at 170uA, together with Floating Filament and Bias suppliesreferenced to the Accelerator to control the beam. The unit also includes high voltage outputs to drive the Detector, comprising PMT, Scintillator and Collector grounded outputs.
Programming signals utilize differential analog inputs to minimize external noise and offset voltages effects. A ground referenced emission current monitor and a filament failure signal are provided.
TYPICAL APPLICATIONS:
Scanning Electron Microscopes (SEM)
Electron Beam Controller
- 사양
- 모델
- 주문 방법
- 다운로드
사양
(Ref. 128031-001 REV. A)
- Input Voltage:
+24Vdc, ±5% @ 2.5A max. - Dimensions:
4.13˝ H x 9.85˝ W x 7.48˝ D (105mm x 250mm x 190mm) excluding the top mounting bracket - Weight:
16.5 lbs. (7.5kg) - Regulatory Approvals:
Compliant to EEC Low Voltage Directive. UL/CUL recognized, File E354595. RoHS Compliant.
OUTPUT SPECIFICATIONS
| Output | Accelerator (Internal Supply) | Bias Cancellation (Internal Supply) | Filament | PMT | Scintillator | Collector |
|---|---|---|---|---|---|---|
| Output Voltage | 0 to -30kV, referenced to ground | 0 to +3.5kV referenced to Accelerator* | -1.936 to +1.936V referenced to Accelerator | 0 to -1300V referenced to ground | +8kV to +11kV referenced to ground | 30V to 500V referenced to ground |
| Output current - max | 170μA | 150μA | 3.87A | 1mA (current trip level: 1.2mA) | 250μA | 5mA |
| Accuracy | ±2% or ±20V (whichever is greater) | ±10% or ±180V (whichever is greater) | 0.1V | ±2% or ±1V (whichever is greater) | ±2% | ±5% |
| Load Regulation | <100ppm for 0 to 170μA | N/A | <2% for 10% change in load resistance | <100ppm for 0 to 1mA | <500ppm for 0 to 250μA | <5% for 0 to 5 mA |
| Line Regulation for a ±5% line change | <100ppm | <0.1% | <1% | <100ppm | <500ppm | <5% |
| Ripple p-p at max output | <20ppm | <5ppm | <0.1% | <200mV | <0.1% | <0.2% |
| Temperature Coefficient | <100 ppm/°C | <1000 ppm/°C | <300 ppm/°C | <1000 ppm/°C | <100 ppm/°C | <1000 ppm/°C |
| Stability (1hr warm up) | 8ppm/3min | 1%/10min | 100ppm/10min | 200ppm/1h | 500ppm/8h | <1500ppm/1h |
모델
주문 방법
HOW TO ORDER
| Description | Part Number |
|---|---|
| EBM-TEG | EBM30N/TEG |
| Low voltage mating connectors accessory Kit | 13802-27 |
| HV Out Cable - 2 meters | HVC30/3SO/1317 |
| HV Out Cable - 3 meters | HVC30/3SO/1314 |
| HV Out Cable - 5 meters | HVC30/3SO/1315 |
| Scintillator Cable - 1 meter | HVC11/1SO/1320 |
| Scintillator Cable - 2 meters | HVC11/1SO/1316 |
다운로드
Typical Applications：
- Scanning Electron (SEM)
- Electron Beam Controller
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