
VS100
- 100kV Electron Beam High Voltage Power Supply
- Low/High 10μA/100μA Output Current Selection
- Less than 75mV of Ripple
- Excellent Regulation and Stability Performance
- Oil Free/Solid Encapsulated Design
*Note: All specifications are subject to change without notice. Please consult the English PDF version of this datasheet for the most up-to-date revision.

Electron Beam High Voltage Power Supply
The Bertan VS100 high voltage power supply was specifically designed for precision electron beam applications like semiconductor nano-lithography, micro-optics and development mask work. Its ultra low ripple and excellent stability specifications make it ideal for use in these demanding applications. A switch selectable low and high output current range is featured.
The solid encapsulated high voltage section eliminates any user maintenance issues, while isolating the components from environmental variables. The unit is fully overload, arc and short circuit protected. Remote control programming and monitoring capability is provided. A second high voltage monitor, separate from the control electronics is provided. This allows accurate passive measurement of the high voltage output.
Typical applications:
- Micro-Optics
- Semiconductor lithography
- Development mask work
Specifications
(Ref. 128045-001 REV. H)
Input Voltage:
220Vac, ±10%, single phase 50/60 Hertz
Output Voltage:
0 to 100kV, negative polarity. Externally switch selectable to 105kV, ±500 volts
Output Current:
0-10µA, low range
0-100µA, high range
Switch selectable
Line Regulation:
±0.001% of rated voltage over specified input voltage range
Load Regulation:
≤20V for a current change of 25μA to 60μA and 60μA to 25μA
Ripple:
≤75mV peak to peak
Partial High Voltage Discharge:
less than 200mV
Stability:
0.001% per 8 hours after a 6 hour warm up, for a temperature of 20°C ±0.2°C
Temperature Coefficient:
50ppm per degree C over a 10°C to 40°C range
Environmental:
Operating Temperature: 0 to 40 degrees C
Storage Temperature: -40 to 85 degrees C
Humidity: 10 to 90% RH, non condensing
Cooling:
Forced Air-control chassis;
Convection Cooled- high voltage chassis
Front Panel:
Power ON/OFF switch
HV ON/OFF switch
HV ON/OFF indicator
Analog output voltage meter
Dimensions:
Control Chassis: 5.25. H X 19. W X 15.3. D (13.3cm X 48.3cm X 38.4cm)
HV Chassis: 10.25. H X 19. W X 27. D (26.7cm X 48.3cm X 55.9 cm)
Weight:
Control Chassis: 20 pounds (9kg)
HV Chassis: 116 pounds (50kg)
Interface Connector:
19 pin Burndy GOB1619SNE (mating connector provided)
AC Input Connector:
3 pin IEC320 input socket
Output HV Connector:
Claymount 2050-073
Output HV Cable:
Detachable at rear panel, cable not provided.
REMOTE INTERFACE CONNECTOR
Pin | Signal | Signal Parameters |
---|---|---|
A | -5V Reference | -5.0 volts @ 10mA output |
B | Voltage Programming | 0 to -5v = 0 to 100% rated output, Zin = 100KΩ |
C | Spare | N/C |
D | Spare | N/C |
E | Monitor Common | Ground |
F | HV Stat | TTL High = HV OFF, TTL Low = HV ON |
G | +5V | 5 volts @ 250mA output |
H | Interlock | Ground or TTL low to enable interlock |
J | Program Common | Ground |
K | Spare | N/C |
L | Spare | N/C |
M | Spare | N/C |
N | Spare | N/C |
P | Voltage Monitor | 0 to -5V = 0 to 100% rated output, Zout =10KΩ |
R | Current Monitor | 0 to -5V = 0 to 100% rated output, Zout =10KΩ |
S | Spare | N/C |
T | Spare | N/C |
U | Spare | N/C |
V | Spare | N/C |
Tables & Diagrams
DIMENSIONS: in.[mm]
FRONT VIEW
TOP VIEW
BACK VIEW
HV CHASSIS
FRONT VIEW
TOP VIEW
BACK VIEW