Scanning Electron Microscopes (SEM)
Spellman’s extensive knowledge in this application has enabled us to develop a range of technology platforms that can be customized to meet demanding customer Electron Beam requirements. Spellman’s EBM range has solutions that will drive most emitters, including thermionic emitters such as Tungsten and LaB6, and Field Emission types such as Cold Cathode and Schottky. All products are provided with the integral outputs to provide the acceleration voltage and drive the emitter, and many also include the HV outputs to drive the many detectors deployed on the Microscopes. With Spellman’s exceptional performance built-in, including low ripple and low micro-discharge, and sub-ppm level stability, the customer is guaranteed the ultimate image quality and resolution, from a repeatable and reliable source... Spellman.
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- Triode Supply for Thermionic SEM
- Precision Accelerator supply -20kV at 250 µA
- Floating Filament and Bias ref. to Accelerator
- Arc and Short Circuit Protection
- Differential Analog Control
- UL Recognised, CE Marked and RoHS Compliant
- Triode Supply for Thermionic SEM
- Precision Accelerator supply -30kV at 170 µA
- Filament, Bias, PMT, Scintillator and Collector outputs
- Arc and Short Circuit Protection
- Differential Analog Control
- UL Recognised, CE Marked and RoHS Compliant
- Cold Cathode and Schottky Field Emission SEM
- Accelerator, Filament, Extractor and Suppressor
- Precision Accelerator supply -30kV at 200 µA
- Optical Vacuum Interlock
- Optically Isolated Digital Interface, test GUI
- UL Recognised, CE Marked and RoHS Compliant
- Nanolithography, Micro-optics and Development Mask
- Precision -100kV Output, Ripple < 75mV
- Low/High 10μA/100μA Output Current Selection
- Separate High Voltage Monitor
- Remote Analog Control
- CE Marked and RoHS Compliant
