FIB СЕРИЯ

  • Встроенные блоки ускорителя и источника ионного излучения
  • Высокоэффективный заземленный блок ионной фокусировки
  • Минимальный уровень пульсаций и максимально стабильные выходные параметры
  • Надежная защита от дугового разряда и короткого замыкания
  • Специальная система для сведения микроразрядов к минимуму
  • Цифровой интерфейс с оптической развязкой
  • Маркировка СЕ и соответствие требованиям SEMI S2

* Примечание: Все спецификации могут быть изменены без предварительного уведомления. Пожалуйста, ознакомьтесь с английской версией PDF этой спецификации для получения последней актуальной информации об оборудовании.

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FIB

Серия Spellman FIB представляет собой встраиваемые высоковольтные источники питания с несколькими выходами, специально созданные для систем с фокусированным ионным пучком. Они вырабатывают стабильное ускорительное напряжение с регулируемыми параметрами для питания традиционных источников ионного излучения (Ga) и генераторов плазмы. Дополнительно используется блок ионной фокусировки, обеспечивающий высокую производительность с фиксированной или реверсивной полярностью для высоковольтных систем, требуемых для фокусировки ионного пучка. Основной блок и блок ионной фокусировки закрепляются на стойке 19". Системы с фокусированным ионным пучком, как правило, используются в полупроводниковой промышленности, материаловедении и все чаще применяются в области биологии для получения изображений, а также при травлении и напылении материалов.

Основной блок обеспечивает ускорительное напряжение до 35 кВ с выходами для регулируемого накала, экстрактора и ограничителя, специально созданных для работы c системами с фокусированным ионным пучком. Блок ионной фокусировки обеспечивает напряжение до 30 кВ с фиксированной или реверсивной полярностью. Все выходные параметры предлагаются с ультранизкой пульсацией, отличной регулировкой и стабильностью, описанными температурным коэффициентом, смещением и точностью. Изоляция и контроль соответствующих регулируемых источников обеспечиваются запатентованным компанией Spellman методом высоковольтной изоляции. Пользовательское управление данной интегрированной системой питания FIB осуществляется с помощью оптоволоконного интерфейса. Все высоковольтные защитные блокировки имеют отказоустойчивую аппаратную конструкцию. Система FIB имеет сертификацию СЕ и соответствует требованиям применимых стандартов IEC, UL и SEMI. Обратитесь к производителю для получения окончательных требований к конфигурации.

Стандартные области применения:

  • Фокусированный ионный пучок
  • Контроллер ионной пушки

Технические характеристики

(Ref. 128029-001 REV. A)

SPECIFICATIONS

Input Voltage:

+24Vdc, ±5% @ 5.5 amps maximum. Inrush is <6 amps for 1 second.

Safety Fuse:

A 5 x 20mm ceramic fuse changeable from the outside and marked with the fuse value.

Power Switch:

A shielded rocker switch allows the unit to be switched ON and OFF from the rear panel.

Environmental:

Operating Temperature:

+10°C to +45°C ambient for normal operation. The unit will operate from 0°C but will require an extended warm up period.

Storage Temperature:

-20°C to +60°C

Humidity:

0 to 80% RH, non-condensing

Altitude:

2000 meters ASL at full power. For altitudes above 2000 meters the maximum ambient operating temperature is linearly derated by 1.1˚C per 300 meter interval.

Mechanical:

Main chassis (rack mountable): See dimension drawings

Lens chassis (rack mountable): See dimension drawings

Weight:

Main chassis: <66.12 lbs. (<30kg)

Lens chassis: <22.04 lbs. (<10kg)

Software:

All communications to the power supply is through a fiber optic link operating at 19.2 kbaud, or Ethernet. A basic self-test capability is provided. This self-test will verify internal consistency of the HVPS, including internal supply voltage levels, reference voltages, firmware integrity, etc. However, the HVPS will not change any output voltages during this test.

Regulatory Approvals:

IEC61010:2010 Safety requirements for electrical equipment for measurement, control and laboratory use. UL61010-1:2012

Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use - Part 1: General Requirements and CAN/CSA-C22.2 No.61010-1-12:2015. The unit is CE marked against EN61010:2010 and EN61326-2-1:2013 and is RoHS compliant.

ACCELERATOR SUPPLY

Output Voltage:

0 V to +35 kV, referenced to ground.

100V absolute accuracy

Output Current:

30μA maximum

Current Limit:

30μA maximum

Load Regulation:

±0.01% of maximum for 0-100% rated current change

Line Regulation:

100mV over input power range

Ripple:

200mV p-p, from 0.1Hz to1MHz at 30kV and 30μA

Temperature Coefficient:

25ppm/˚C

Stability:

1.5V/10 hours after 2 hour warm-up

Programming:

16 bit resolution, 0V to +35kV

Monitoring:

14 bit resolution, 0V to +35kV, ±1% accuracy (±50V offset)

14 bit resolution, 0μA to 30μA, ±1% accuracy (±0.3μA offset)

Response:

<1.0 second

F ILAMENT SUPPLY

Output Voltage:

0 to 5Vdc, referenced to Accelerator, current controlled

Output Current:

0 to 5 amp, 5mA absolute accuracy

Load Regulation:

±0.1% of maximum for 0 to maximum rated voltage change

Line Regulation:

5mA over input power range

Ripple:

10mA p-p, from 0.1Hz to 1MHz

Temperature Coefficient:

200 ppm/°C

Stability:

5 mA/10 minutes after 2 hour warm-up

Programming:

16 bit resolution, 0A to 5A

Monitoring:

16 bit resolution, 0V to 5V, ±4% accuracy (±0.1V offset)

16 bit resolution, 0A to 5A, ±4% accuracy (±50mA offset)

Response:

< 0.10 sec, >5A/s measured between 10% to 90% or 90% to 10%

SUPPRESSOR SUPPLY

Output Voltage:

-2 kV to +2kV, referenced to Accelerator, ±20V absolute accuracy

Output Current:

30μA

Current Limit:

30μA

Load Regulation:

±0.01% of maximum for 0 to maximum rated voltage change

Line Regulation:

100mV over input power range

Ripple:

150mV p-p, from 0.1Hz to 1MHz

Temperature Coefficient:

25 ppm/°C

Stability:

0.5 V/10 hours after 2 hour warm-up

Programming:

16 bit resolution, -2kV to +2kV

Monitoring:

14 bit resolution, -2kV to +2kV, ± 1% accuracy (±8V offset)

Response:

<0.25 sec

EXTRACTOR SUPPLY

Output Voltage:

0 to -15kV, referenced to Accelerator, 100V absolute accuracy

Output Current:

400μA

Current Limit:

programmable, 8 bit resolution, 0 μA to 400μA, (default value on supply enable is 400μA)

Load Regulation:

±0.01% of maximum for 0 to maximum rated voltage change

Line Regulation:

100 mV over input power range

Ripple:

100mV p-p, from 0.1Hz to 1MHz at 30μA and below

Temperature Coefficient:

25 ppm/°C

Stability:

0.5 V/10 hours after 2 hour warm-up

Programming:

16 bit resolution, 0V to -15kV

Monitoring:

16 bit resolution, 0V to -15kV, ±1% accuracy (±15V offset)

16 bit resolution, 0μA to 400μA:

10μA to 400μA, ±3% accuracy (±5μA offset)

0μA to 10μA, > 5kV, ±0.05μA accuracy (±0.05μA offset)

Response:

<1 sec

>1.33kV/s measured between 10% to 90% and 90% to 10%

Trips:

Hard trip at 400μA in <0.25 sec programmable trip delay (for when current at I limit). 0 sec to 255 sec, 8 bit resolution (5 sec minimum, 20 second default)

LENS 1 SUPPLY

Output Voltage:

0kV to +30 kV referenced to ground 100V absolute accuracy

Output Current:

30μA

Current Limit:

30μA

Load Regulation:

±0.01% of maximum for 0 to maximum rated current change

Line Regulation:

100mV over input power range

Ripple:

100mV p-p, from 0.1Hz to 1MHz

Temperature Coefficient:

25 ppm/°C

Stability:

1.0 V / 10 hours after 2 hour warm-up

Programming:

16 bit resolution, 0 to +30kV

Monitoring:

16 bit resolution, 0kV to +30kV, ± 1% accuracy (±30V offset)

16 bit resolution, 0μA to +30μA, ± 3% accuracy (±1μA offset)

Response:

<0.1 s

<4 sec to reach <2V away from steady state for 20kV to 18kV change.

<4 sec to reach <2V away from steady state for 18kV to 20kV change.

>6.0kV/s measured between 10% to 90% or 90% to 10%

Wobble Range:

2V to 2.5kV peak to peak, sinusoidal. If wobbling occurs near zero, the wobble waveform will be clipped so as to prevent crossing zero.

Wobble Period:

1 second to 4 seconds

LENS 2 SUPPLY

Output Voltage:

-30kV to +30kV referenced to ground 100V absolute accuracy

Polarity:

Bipolar

Output Current:

30μA

Current Limit:

30μA

Load Regulation:

±0.005% of maximum for 0 to maximum rated current change

Line Regulation:

100mV over input power range

Ripple:

200mV pk-pk, from 0.1Hz to 1MHz

Temperature Coefficient:

25 ppm/°C

Stability:

1.0V / 10 hours after 2 hour warm-up

Programming:

16 bit resolution, -30kV to +30kV

Monitoring:

14 bit resolution, -30kV to +30kV, ±1% accuracy (±15V offset)

14 bit resolution, -30μA to +30μA, ±3% accuracy (±1μA offset)

Response:

<0.1 s

<4 sec to reach <2V away from steady state for 20kV to 18kV change.

<4 sec to reach <2V away from steady state for 18kV to 20kV change.

Wobble Range:

2V to 2.5kV peak to peak, sinusoidal. If wobbling occurs near zero, the wobble waveform will be clipped so as to prevent crossing zero.

Wobble Period:

1 second to 4 seconds

Additional Bipolar:

The above specifications do not apply in the range -500V to +500V. Operation at 0V output is not a requirement. The module must enable at 0V output. Programming and monitoring is offset binary

Indicators:

Power On:

A green LED illuminates when 24Vdc is applied to the unit

Interlock:

A yellow LED illuminates when the interlock(s) are made

Interlocks:

If the interlock is not present communication over the optical bus will remain operational.

Output voltages will be <1000V in <30 seconds when the interlock opens. The interlock will deactivate the power supply via relay contacts and will not reactivate until the supply is enabled through the computer control, even though the interlock may close.

Panel removal: all outputs disabled

Upper column: All outputs except lens 2 disabled

Lens 2: Disable only the lens 2 output

The individual modules of the HVPS can be enabled and disabled through computer control, provided the appropriate hardware interlocks are enabled.

Lens Supply Options:

Lens 1 Lens 2
+30kV +25kV/-15kV
-30kV
+25kV/-15kV
+/-30kV
+/-30kV
+/-20kV
+/-30kV

INPUT POWER—
AMP/TYCO 2-PIN MATE-N-LOCK

PIN SIGNAL  I/O PARAMETERS 
1 +24Vdc
 I  Power input
2
0V
Power ground 


MAIN HV CONNECTOR

The main high voltage output is fitted with a custom 4 pole receptacle. See page 5 of 6 for detail.

INTERLOCK—
9 PIN FEMALE D CONNECTOR

PIN SIGNAL PARAMETERS 
1 Not used
Not connected internally
2
Not used
Not connected internally 
Not used Not connected internally 
Not used  Not connected internally 
+ Upper Column Interlock  Current limited interlock supply 
6 - Upper Column Interlock  Opto isolated interlock input 
+ Lens 2 Interlock  Current limited interlock supply 
- Lens 2 Interlock  Opto isolated interlock input 
Shield/Ground  Ground 

Switch closure turns ON or enables the supplies

INTERLOCK—
9 PIN FEMALE D CONNECTOR

PIN SIGNAL PARAMETERS 
1 TD+
TD+
2
TCT (3V3)
TCT (3V3)
TD- TD-
RD+ RD+
RCT (3V3) RCT (3V3) 
6 RD- RD-
N/C No Connection
0V (reference) 0V (reference)
0V (reference) 0V (reference)
10  0V (reference)  0V (reference) 
11  N/C  No Connection 
12  N/C  No Connection 

The RJ45 socket is fitted for future use, it is configured for 10/100 Mb/s systems using the IEEE 802.3 serial management interface and can only be used for this purpose and is fitted with a blanking plug

LENS 1 CONNECTOR—Lemo ERA3Y430CTL

LENS 2 CONNECTOR—Lemo ERA3Y430CTL

FIBER CONNECTOR

The fiber optics communications connector is a dual channel Avago HFBR- 2524z/1524z connector.

INTERCONNECTIONS BETWEEN CHASSIS

FIB Series 

COMMUNICATIONS

The main chassis is provided with a 9 pin D connector which connects via a “one to one” cable to the same connector on the lens chassis. This allows the main chassis to control and monitor the lens outputs. An additional connector is provided on the lens chassis to allow a second lens chassis to be connected to the base unit via the first lens chassis.

INTERCONNECTION POWER—
AMP/TYCO 3-PIN MATE-N-LOCK

PIN SIGNAL  I/O PARAMETERS 
1 OV
 I  DC24V Common
2
N/C
No Connection
+ 24V  DC24V Input 

Power is transferred between the two chassis via 3 pin “Mate-n-Lok” style connectors. This is interlocked via the main chassis.

An additional power connector is also provided on the lens chassis to allow 24V to be provided to a second lens chassis.

Input and Output cables are not provided with unit. Interconnect cables are provided with the unit. Consult factory for available options.

Таблицы и диаграммы

Main Chassis

DIMENSIONS: in.[mm]

TOP VIEW

FIB Series

SIDE VIEW

FIB Series

FRONT VIEW

FIB Series

FIB Series

REAR VIEW

FIB Series

Lens Chassis

DIMENSIONS: in.[mm]

TOP VIEW

FIB Series

SIDE VIEW

FIB Series

FRONT VIEW

FIB Series

REAR VIEW

FIB Series