- Integrated Accelerator and Ion Source Chassis
- High Performance Ground Reference Lens Chassis
- Very Low Ripple and Ultra Stable Outputs
- Robust Arc and Short Circuit Protection
- Design to Minimize Micro-discharge Events
- Optically Isolated Digital Interface
- CE Marked & Designed to Meet SEMI S2
*Note: All specifications are subject to change without notice. Please consult the English PDF version of this datasheet for the most up-to-date revision.
Spellman’s FIB Series is an integrated multiple output high voltage power supply specifically designed for focused ion beam applications. It incorporates a high stability accelerator voltage with the floating outputs to drive traditional Ga Ion and Plasma Sources.
An additional Lens Chassis is available, providing the high performance fixed or reversible polarity high voltage lenses required to focus the Ion Beam. Both the Main Chassis and Lens Chassis are 19” rack mountable. Focused Ion Beam is typically used in the semiconductor industry, materials science and increasingly in the biological field for imaging, etching and deposition of materials.
The Main Chassis provides an Acceleration voltage up to 35kV, with floating Filament, Extractor and Suppressor outputs, all designed to the exacting performance requirements for FIB applications. The Lens Chassis offers Lens voltages up to 30kV, with fixed or Reversible polarity.
All outputs are offered with ultra-low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications.
Customer control of this integrated FIB power supply system is accomplished via a fiber optic interface. All high voltage safety interlocks are of a failsafe hardware based design.
- Focused Ion Beam (FIB)
- Ion Gun Controller
(Ref. 128029-001 REV. C)
+24Vdc, ±5% @ 5.5 amps maximum. Inrush is <6 amps for 1 second.
+10°C to +45°C ambient for normal operation. The unit will operate from 0°C but will require an extended warm up period.
-20°C to +60°C
0 to 80% RH, non-condensing
2000 meters ASL at full power. For altitudes above 2000 meters the maximum ambient operating temperature is linearly derated by 1.1˚C per 300 meter interval.
FIB Input Power Connector:
2 pin Mate-n-Lok (TE 1-350942-0)
Fiber Optics dual channel Avago HFBR- 2524z/1524z. RS-232. Ethernet RJ-45 socket which supports 100BaseTX. When Ethernet port is connected, RS-232 will not work. A Spellman Fiber Optic to RS-232 converter can be ordered, as well as a complete Fiber Optic to USB communication kit.
FIB Vacuum Interlock Connector:
Dual channel Avago HFBR- 2524z (receiver) /1524z (transmitter)
FIB to Lens Modules Interconnection:
The modules are supplied with interconnecting cables for the power and communications. The same kit is used to connect the FIBC to the lens module, and, if required, between a lens module and the next.
FIB HV Output Connector:
The main high voltage output is fitted with a custom 4 pole receptacle. A Spellman HV cable assembly, available in different lengths, can be ordered with the unit.
Lenses HV Output Connectors:
The lenses are fitted with Lemo ERA3Y430CTL receptacles. A Spellman 5 meters mating HV cable assembly can be ordered with the units. (See the product manual for additional cables and connectors information)
The vacuum interlock is an optical interlock. When it opens, the power supply is deactivated via relay contacts and will not reactivate until it is enabled through the computer control, even though the interlock may close. The FIB communication remains operational.
The interlock plate is situated around the FIB HV Output connector, and if removed will also disable all outputs.
The individual modules of the HVPS can be enabled and disabled through computer control, provided the appropriate hardware interlocks are enabled.
Main chassis: 67.46 lbs. (30.6 kg)
Lens chassis: 27.56 lbs. (12.5 kg)
Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.
|Output Voltage||0 to 35kV, referenced to ground||0 to 5V referenced to Accelerator, current controlled||-2kV to +2kV referenced to Accelerator||0 to -15kV referenced to Accelerator||30kV max, referenced to ground, positive, negative or bipolar. (see Lens Module options table)|
|Output current max||30μA||5A||30μA||400μA||30μA or 50μA (see config. table)|
|Output current limit||30μA||current controlled||30μA||programmable 8 bit, 0 to 400μA||30μA or 50μA ( see config. table)|
|Output Absolute Accuracy||100V||5mA||20V||100V||100V|
|Load Regulation||±0.01% of max for 0 to 30μA change||±0.1% of max for 0 to 5V change||±0.01% of max for 0 to 30μA change||±0.01% of max for 0 to 400μA change||±0.005% of max for 0 to max rated current change|
|Line Regulation||100mV for a 5% line change||5mA for a 5% line change||100mV for a 5% line change||100mV for a 5% line change||100mV for a 5% line change|
|Ripple p-p from 0.1Hz to 1MHz||200mV at max output||10mA||150mV||100mV at 30μA and below||200mV for 30kV bipolar outputs.150mV for all other output ratings|
|Temperature Coefficient||25 ppm/°C||200 ppm/°C||25 ppm/°C||25 ppm/°C||25 ppm/°C|
|Stability (after 2h warm up)||1.5V / 10h||5mA/10min||0.5V / 10h||0.5V / 10h||1V / 10h|
|Programming||16 bit, 0 to 35kV||16 bit, 0 to 5A||16 bit, -2kV to +2kV||16 bit, 0 to -15kV||16 bit, min to max Vout|
||16 bit, 0 to 35kV
|16 bit, 0 to 5V
|16 bit, -2kV to +2kV
|16 bit, 0 to -15kV
| 18 bit, min to max Vout,
||16 bit, 0 to 30μA
|16 bit, 0 to 5A
± 4% accuracy
16 bit 0 to 10μA:
16 bit 10μA to 400μA:
|18 bit, min to max Iout
|Response (See note 1)
||<1.0 s||<0.1 s||<0.25 s||<0.25 s|| <0.1 s, <4 sec to reach
<2V away from steady state for
20kV to 18kV and
18kv to 20kV change
|Additional info||see note 2||see notes 3 and 4|
This is the time taken for the output signal of a module to settle (to 0.2% of the step size, or 1 V (20 mA for the filament), whichever is greater) in response to a ±2% or less (of full scale) step in its output, as measured from when the output first starts to change.
Hard trip at 400μA in < 0.25s programmable trip delay (for when current at I limit) 0 to 255s, 8 bit res., (5s min, 20s default)
The above specifications do not apply in the range -500V to +500V
Wobble range: 2V to 2.5kV p-p, sinusoidal. If wobbling occurs near zero, the wobble waveform will be clipped so as to prevent crossing zero.
Wobble Period: 1s to 4s
|Available as Standard||Lens 1 Output||Lens 2 Output|
|LGM30P/25PN||0V to +30kV||30uA||-25kV to +25kV||30uA|
|LGM30P/30P||0V to +30kV||30uA||0V to +30kV||30uA|
|LGM30P/25N||0V to +30kV||30uA||0V to -25kV||30uA|
|Available on Request||Lens 1 Output||Lens 2 Output|
|LGM20PN/30PN||-20kV to 20kV||30uA||-30kV to +30kV||30uA|
|LGM30N/25PN||0V to -30kV||30uA||-25kV to +25kV||30uA|
|LGM20N/10N||0V to -20kV||50uA||0 to -10kV||50uA|
Please consult with factory for availability and custom configuration requests.
테이블 및 다이어그램
HOW TO ORDER
|FIB - Main Chassis||FIBC35|
|LGM - Lens Chassis||See part number in the Lens Modules Table|
|FIBC to Lens Modules
|FIBC HV Output cable||2.8 meters: HVC30/4ISO/1209
5 meters: HVC30/4ISO/1297
|Lens HV Output cable||5 meters: HVC30/1S/1253|
|FIB communication kit||FIBK100|
|Optical to RS-232 converter||21777|