Spellman은 정전기 웨이퍼 "Chuck" 모듈의 새로운 ESC 패밀리를 소개한다.

6월 27, 2011

ECHUCK2011년 6월 28일 – International Trade Fair International Trade Fair 새로운 ESC 시리즈 정전기 척 고전압 전력 공급 장치 도입을 발표하였다.

ESC 시리즈는 반도체에 기반한 정전기 척 웨이퍼 응용을 위해 요구된 선명하고 정확하며 쉽게 제어할 수 있는 전압을 특징으로 한다. 이러한 잘 조절된 공급 장치는 긴 공정 주기 동안 웨이퍼를 정확하게 보호한다. 관련된 유동 중심 탭 포인트를 가진 실제 유동 이극성 출력을 특징으로 하는 유닛에 추가하여 접지 참조 복원 가능한 출력에 대해 각 형식을 이용할 수 있다.

포괄적 고장 진단 전기 회로망은 전원 공급장치 기능성을 모니터링하고 사용자 인터페이스와 상태 정보를 통신한다. Spellman의 ESC 시리즈 전원 공급장치는 최소 시스템 공간을 요구하는 OEM 설치를 위해 설계된 콤팩트한 경량의 패키지에 보관된다.

ESC 시리즈에 관한 기술 문헌 및 추가 정보는 다음 링크를 통해 얻을 수 있다:
www.spellmanhv.com/datasheets/esc

Spellman 및 넓은 범위의 고전압 제품에 관한 정보는 +1-631-630-3000로 연락을 취하거나 웹 사이트를 방문하여 얻을 수 있다: www.spellmanhv.com

Spellman High Voltage Electronics은 고객 사용자 지정 표준 AC-DC 및 DC-DC 고전압 전력 변환장치 및 의료, 산업, 반도체, 보안, 분석, 실험 및 해저 케이블 전력 피드 응용을 위한 Monoblock® X-선 소스의 글로벌 선도적 제작사이다. 미국, 영국, 멕시코, 중국 및 일본 내의 설계, 제작 및 서비스 시설 및 유럽, 아시아 및 북미 전역에 직접 영업 사무소를 개설하고 있다. Spellman은 세계 전역의 선진 시스템 사업자 및 고객 지원을 적극 추진하고 있다.

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9월 09, 2026

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8월 25, 2026

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8월 18, 2026

Spellman High Voltage to Exhibit at IMC21 in Liverpool, UK

Hauppauge, NY - Spellman High Voltage Electronics will exhibit at the 21st International Microscopy Congress (IMC21), taking place August 31 – September 3, 2026, at the Liverpool Experience Campus in Liverpool, UK. Attendees are invited to visit Booth #230 to discuss their application and high-voltage requirements with Spellman's technical and sales staff. Spellman's comprehensive portfolio of standard and OEM customized high-voltage solutions is specifically designed to meet the demanding requirements of microscopy, microanalysis, and advanced analytical instrumentation. Backed by decades of application expertise and innovative engineering, Spellman delivers precision power solutions with low ripple, ultra-stable outputs, minimal micro-discharges, and robust system protection to help customers achieve superior imaging performance. Standard and OEM customized Precision High Voltage Solutions are available for: • Scanning Electron Microscopes (SEM) • Focused Ion Beam (FIB) • Transmission Electron Microscopes (TEM) • Lenses and Micro Optics • Semiconductor Lithography and Development Mask Work • Mass Spectrometry • Analytical X-ray • Spectroscopy • Electrostatic Chucks (ESC) • And more… Spellman's Electron Beam Module (EBM) range offers solutions capable of driving most electron emitters, including thermionic emitters such as Tungsten and LaB₆, as well as field emission sources including Cold Cathode and Schottky emitters. These systems provide integrated outputs for acceleration voltage and emitter drive, while many models also include the high-voltage outputs required to power the multiple detectors used in modern electron microscopes. Spellman's Focused Ion Beam (FIB) range incorporates high-stability accelerator voltages with floating outputs to drive traditional gallium ion and plasma sources in a compact 19-inch rack solution. An additional Lens Rack is available, providing high-performance fixed or reversible polarity high-voltage lens supplies required to focus the ion column for demanding microscopy applications. With Spellman's exceptional performance—including low ripple, low micro-discharge, and ppm-level stability—customers can achieve outstanding image quality, resolution, and long-term system reliability. Visit Booth #230 to learn how Spellman's advanced, cost-effective high-voltage technologies can enhance the performance of your microscopy and analytical instrumentation systems. The International Microscopy Congress is one of the world's premier microscopy events, bringing together researchers, instrument manufacturers, and technology leaders to showcase the latest advances in microscopy, imaging, and microanalysis. Spellman High Voltage:. Spellman High Voltage Electronics is the world's leading provider of high performance, custom and standard DC high voltage power converters and Monoblock® X-ray sources for medical, industrial, semiconductor, security, analytical, laboratory and under-sea cable power-feed applications. As a global supplier with strategically located design and manufacturing facilities in North America, Europe and Asia, Spellman is committed to providing best-in-class support to OEM customers and end-users throughout the world. Information on Spellman and our wide range of high voltage products is available by visiting our global website: https://www.spellmanhv.com/.

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