Ion Implantation
Spellman High Voltage has been the preferred provider of high voltage power supplies for ion beam implantation for over three decades. Spellman’s SL Series from 1kV-360kV @ 10 watts to 2000 watts have outfitted implanters around the world. Special customization allows the units to operate in the extreme environment typical for ion beam implantation. Spellman’s ST Series from 1kV-225kV @ 12kW, with parallel operation allowing powers of 100kW’s or more power the implanters of both today and tomorrow.
- Muy compacta y ligera
- Rango de voltaje de 1 kV a 130 kV
- Extensas interfaces analógicas y digitales
- Elevación de polaridad reversible de hasta 8 kV
- Extinción/conteo/desconexión de arco
- Personalización disponible para OEM
- Models from 1kV to 225kV
- 12kW Output Parallel Units for Higher Power
- Single 6U (10.5”) Chassis
- Remote Analog and Remote Ethernet Interface
- User Configurable Settings Via Ethernet Interface
- Chasis completo de 3U (5.25”, 133.35 mm)
- Modelos de 1 kV a 70 kV
- Interfaz remota analógica e interfaz Ethernet
- Configuraciones programables por el usuario a través de la interfaz Ethernet
- Chasis completo de 6U (10.5”, 266.7 mm)
- Modelos de 1 kV a 150 kV
- Interfaz remota analógica e interfaz Ethernet
- Configuraciones programables por el usuario a través de la interfaz Ethernet
