FIB

Spellman’s FIB Series is an integrated multiple output high voltage power supply specifically designed for focused ion beam applications. It incorporates a high stability accelerator voltage with the floating outputs to drive traditional Ga Ion and Plasma Sources.

An additional Lens Chassis is available, providing the high performance fixed or reversible polarity high voltage lenses required to focus the Ion Beam. Both the Main Chassis and Lens Chassis are 19” rack mountable. Focused Ion Beam is typically used in the semiconductor industry, materials science and increasingly in the biological field for imaging, etching and deposition of materials.

The Main Chassis provides an Acceleration voltage up to 35kV, with floating Filament, Extractor and Suppressor outputs, all designed to the exacting performance requirements for FIB applications. The Lens Chassis offers Lens voltages up to 30kV, with fixed or Reversible polarity.

All outputs are offered with ultra-low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications.

Customer control of this integrated FIB power supply system is accomplished via a fiber optic interface. All high voltage safety interlocks are of a failsafe hardware based design.

TYPICAL APPLICATIONS:

• Focused Ion Beam (FIB)
• Ion Gun Controller

사양

^{(Ref. 128029-001 REV. C)}

SPECIFICATIONS

Input Voltage:

+24Vdc, ±5% @ 5.5 amps maximum. Inrush is <6 amps for 1 second.

Environmental:

Operating Temperature:

+10°C to +45°C ambient for normal operation. The unit will operate from 0°C but will require an extended warm up period.

Storage Temperature:

-20°C to +60°C

Humidity:

0 to 80% RH, non-condensing

Altitude:

2000 meters ASL at full power. For altitudes above 2000 meters the maximum ambient operating temperature is linearly derated by 1.1˚C per 300 meter interval.

FIB Input Power Connector:

2 pin Mate-n-Lok (TE 1-350942-0) 

FIB Communication:

Fiber Optics dual channel Avago HFBR- 2524z/1524z. RS-232. Ethernet RJ-45 socket which supports 100BaseTX. When Ethernet port is connected, RS-232 will not work. A Spellman Fiber Optic to RS-232 converter can be ordered, as well as a complete Fiber Optic to USB communication kit.

FIB Vacuum Interlock Connector:

Dual channel Avago HFBR- 2524z (receiver) /1524z (transmitter)

FIB to Lens Modules Interconnection:

The modules are supplied with interconnecting cables for the power and communications. The same kit is used to connect the FIBC to the lens module, and, if required, between a lens module and the next.

FIB HV Output Connector:

The main high voltage output is fitted with a custom 4 pole receptacle. A Spellman HV cable assembly, available in different lengths, can be ordered with the unit.

Lenses HV Output Connectors:

The lenses are fitted with Lemo ERA3Y430CTL receptacles. A Spellman 5 meters mating HV cable assembly can be ordered with the units. (See the product manual for additional cables and connectors information)

Safety Interlocks:

The vacuum interlock is an optical interlock. When it opens, the power supply is deactivated via relay contacts and will not reactivate until it is enabled through the computer control, even though the interlock may close. The FIB communication remains operational.

The interlock plate is situated around the FIB HV Output connector, and if removed will also disable all outputs.

The individual modules of the HVPS can be enabled and disabled through computer control, provided the appropriate hardware interlocks are enabled.

Weight:

Main chassis: 67.46 lbs. (30.6 kg)
Lens chassis: 27.56 lbs. (12.5 kg)

Regulatory Approvals:

Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.

OUTPUT SPECIFICATIONS

Note 1:
This is the time taken for the output signal of a module to settle (to 0.2% of the step size, or 1 V (20 mA for the filament), whichever is greater) in response to a ±2% or less (of full scale) step in its output, as measured from when the output first starts to change.

Note 2:
Hard trip at 400μA in < 0.25s programmable trip delay (for when current at I limit) 0 to 255s, 8 bit res., (5s min, 20s default)

Note 3:
The above specifications do not apply in the range -500V to +500V

Note 4:
Wobble range: 2V to 2.5kV p-p, sinusoidal. If wobbling occurs near zero, the wobble waveform will be clipped so as to prevent crossing zero.

Wobble Period: 1s to 4s 

LENS MODULES

Please consult with factory for availability and custom configuration requests.

테이블 및 다이어그램

Lens Chassis

DIMENSIONS: in.[mm]

Main Chassis

DIMENSIONS: in.[mm]

TOP VIEW

FRONT VIEW

REAR VIEW

Lens Chassis

DIMENSIONS: in.[mm]

TOP VIEW

FRONT VIEW

REAR VIEW

HOW TO ORDER