電子ビーム蒸着
Spellman’s EVA Series of high voltage power supplies is specifically designed for E-Beam Evaporation. Low stored energy and fast slew rates keeps the output voltage at the optimum setting for consistent deposition rates. Customer configurable arc intervention allow the unit to be setup for specific applications. A single EVA can operate up to three channels in a single chamber via an optional custom integrated filament power supply. Up to three filament supplies can be configured with a single high voltage power supply, providing unmatched economy and flexibility.
- 電子ビームコーティング用途に設計
- 電力レベル3kW、6kW、12kW
- リモートアナログおよびイーサネット/RS-232インターフェイス
- 高速でユーザーが設定できるダイナミックアーク介入
- オプションのフィラメントガン電源 (最大3チャネル)
