Spellman Introduces New Focused Ion Beam High Voltage Power Supply
New FIB High Voltage Power Supply Features Very Low Ripple and Ultra-Stable Outputs
Spellman High Voltage Electronics Corp, the world’s leading high voltage power supply, X-Ray generator and Monoblock® X-Ray source manufacturer, announces the introduction of their new integrated multiple output high voltage power supply specifically designed for focused ion beam applications. Focused Ion Beam is typically used in the semiconductor industry, materials science and increasingly in the biological field for imaging, etching and deposition of materials.
This product incorporates a high stability accelerator voltage with the floating outputs to drive traditional Ga Ion and Plasma Sources. An additional Lens Chassis is available, providing the high performance fixed or reversible polarity high voltage lenses required to focus the Ion Beam. Both the Main Chassis and Lens Chassis are 19’ rack mountable. It has very low ripple and ultra-stable outputs, as well as a robust arc and short circuit protection. It is designed to minimize micro-discharge events.
The Main Chassis provides an Acceleration voltage up to 35kV, with floating filament, extractor and suppressor outputs, all designed to the exacting performance requirements for FIB applications. The Lens Chassis offers Lens voltages up to 30kV, with fixed or reversible polarity. All outputs are offered with ultra-low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications. Isolation and control of the respective floating sources is provided via Spellman’s proprietary high voltage isolation techniques. Customer control of this integrated FIB power supply system is accomplished via a fiber optic interface. All high voltage safety interlocks are of a failsafe hardware based design. The FIB is CE marked and is designed to be compliant with applicable IEC, UL and SEMI standards.
Detailed Information Available
Detailed technical information and datasheets on these or any of Spellman’s wide range of high voltage products is available by contacting sales@spellmanhv.com or by visiting Spellman’s website: www.spellmanhv.com.
Spellman High Voltage Electronics is the world's leading provider of custom designed and standard AC-DC and DC-DC high voltage power converters and Monoblock® X-Ray sources for medical, industrial, semiconductor, security, analytical, laboratory, and under-sea cable power-feed applications. With design, manufacturing and service facilities in the US, UK, Mexico, China and Japan, and direct sales offices throughout Europe, Asia and North America, Spellman is committed to supporting advanced system providers and their customers throughout the world.