VS100

  • 电子束高压电源
  • 100kV 输出能力
  • 低的/高的10μA/100μA 输出电流选择
  • 纹波小于75mV
  • 卓越的调节和稳定性能
  • 无油/固体封装设计

电子束高压电源

Bertan VS100 高压电源是专为精密的电子束应用而设计,如半导体纳米蚀刻、微光学和开发掩模工作。极低的纹波和卓越的稳定性规格,使其成为苛刻应用的理想之选。特点是:通过开关可以选择低的或高的输出电流范围。

固体封装的高压部分消除了一些用户维护问题,同时隔离了部件免受环境变量影响。此电源有全面的过载、电弧和短路保护。提供远程控制编程和监测能力。提供一个从控制电子设备分离的附加高压监测,此允许精确的高压输出的测量。

典型应用:

  • 微光学
  • 半导体光刻
  • 开发掩模工作

CE Marking

规格

(Ref. 128045-001 REV. F)

Input Voltage:

220Vac, ±10%, single phase 50/60 Hertz

Output Voltage:

0 to 100kV, negative polarity. Externally switch selectable to 105kV, ±500 volts

Output Current:

0-10µA, low range

0-100µA, high range

Switch selectable

Line Regulation:

±0.001% of rated voltage over specified input voltage range

Load Regulation:

≤20V for a current change of 25μA to 60μA and 60μA to 25μA

Ripple:

≤75mV peak to peak

Partial High Voltage Discharge:

less than 200mV

Stability:

0.001% per 8 hours after a 6 hour warm up, for a temperature of 20°C ±0.2°C

Temperature Coefficient:

50ppm per degree C over a 10°C to 40°C range

Environmental:

Operating Temperature: 0 to 40 degrees C

Storage Temperature: -40 to 85 degrees C

Humidity: 10 to 90% RH, non condensing

Cooling:

Forced Air-control chassis;

Convection Cooled- high voltage chassis

Front Panel:

Power ON/OFF switch

HV ON/OFF switch 

HV ON/OFF indicator

Analog output voltage meter

Dimensions:

Control Chassis: 5.25. H X 19. W X 15.3. D (13.3cm X 48.3cm X 38.4cm)

HV Chassis: 10.25. H X 19. W X 27. D (26.7cm X 48.3cm X 55.9 cm)

Weight:

Control Chassis: 20 pounds (9kg)

HV Chassis: 116 pounds (50kg)

Interface Connector:

19 pin Burndy GOB1619SNE (mating connector provided)

AC Input Connector:

3 pin IEC320 input socket

Output HV Connector:

Claymount 2050-073

Output HV Cable:

Detachable at rear panel, cable not provided.

Regulatory Approvals: 

Compliant to 2004/108/EC, The EMC Directive and 2006/95/EC, The Low Voltage Directive.

REMOTE INTERFACE CONNECTOR

Pin Signal Signal Parameters
A -5V Reference -5.0 volts @ 10mA output
B Voltage Programming 0 to -5v = 0 to 100% rated output, Zin = 100KΩ
C Spare N/C
D Spare N/C
E Monitor Common Ground
F HV Stat TTL High = HV OFF, TTL Low = HV ON
G +5V 5 volts @ 250mA output
H Interlock Ground or TTL low to enable interlock
J Program Common Ground
K Spare N/C
L Spare N/C
M Spare N/C
N Spare N/C
P Voltage Monitor 0 to -5V = 0 to 100% rated output, Zout =10KΩ
R Current Monitor 0 to -5V = 0 to 100% rated output, Zout =10KΩ
S Spare N/C
T Spare N/C
U Spare N/C
V Spare N/C

表和图

DIMENSIONS: in.[mm]

FRONT VIEW

VS100 电子束高压电源 (Image 2)

TOP VIEW

VS100 电子束高压电源 (Image 4)

BACK VIEW

VS100 电子束高压电源 (Image 6)

HV CHASSIS

FRONT VIEW

VS100 电子束高压电源 (Image 3)

TOP VIEW

VS100 电子束高压电源 (Image 5)

BACK VIEW

VS100 电子束高压电源 (Image 7)

Note: All specifications are subject to change without notice. Please consult the PDF version of this datasheet for the most up-to-date revision.