FIBX

  • 集成单机架解决方案
  • 高稳定性,非常低的纹波
  • 封装的高压部分
  • 无电晕操作
  • 光隔离数字接口
  • CE 标示、设计符合SEMI S2

聚焦离子束高压电源

斯派曼FIBX 电源是一台集成多路输出的高压电源,专为聚焦离子束而设计。典型的应用包括透视和扫描电子显微镜;半导体分析、加工和维修;磁盘驱动器头平衡、离子束蚀刻和聚焦离子束印刷。

模块化设计方式使得单个组件很容易配置在一个共同的6U 机架中。接口、逻辑和控制电路使用了表面贴装技术,将成本减到最少并减小了尺寸。斯派曼的领导力在于专有的功率转换技术和专有的高压封装技术,在所有的FIBX 运行环境中,提供可靠的并无故障运行。

单独的电源( 减速器、灯丝、提取器、抑制或透镜)设计用于严格的应用。具体标准:极低的输出纹波、卓越的调节、稳定性、温度系数、漂移和精度规格。通过斯派曼专有的高压隔离技术,提供对各自浮地源的隔离和控制。

通过光纤隔离RS-232 接口,实现了集成FIBX 电源系统的客户控制。所有的高压安全互锁都是以失效保护的硬件基础设计。FIBX 有CE 标示并被设计成符合可应用的IEC、UL 和SEMI 的标准。

典型的应用:

  • 透视扫描电子显微镜
  • 扫描电子显微镜
  • 半导体分析、加工和维修
  • 离子束蚀刻
  • 聚焦离子束印刷

规格

(Ref. 128029-001 REV. G)

Input Voltage:

105 to 240Vac, 47 to 63 Hz

ACCELERATOR SUPPLY Referenced to Ground

Output Voltage: 0 to +45 kV

Output Current: 30 µA

Ripple: 200 mV p-p, from 0.1 Hz to1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change

Stability: 1.5 volts/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

FILAMENT SUPPLY Referenced to Accelerator

Output Voltage: 0 to 5 Vdc

Output Current: 0 to 5 A

Ripple: 10 mA p-p from 0.1 Hz to 1 MHz

Line Regulation: 5 mA for +/-10% line change

Load Regulation: ±0.1% of maximum voltage for full load change

Stability: 5 mA/10 minutes after 2 hour warm-up

Temperature Coefficient: 200 ppm /°C

SUPPRESSOR SUPPLY Referenced to Accelerator

Output Voltage: -2 kV to +2 kV

Output Current: 30 µA

Ripple: 150 mV p-p from 0.1 Hz to 1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change Stability: 500mV/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

EXTRACTOR SUPPLY Referenced to Accelerator

Output Voltage: 0 to -15 kV

Output Current: 400 µA

Ripple: 100 mV p-p, from 0.1 Hz to 1 MHz at 30 µA and below

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change Stability: 500mV/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

LENS 1 SUPPLY Referenced to Ground

Output Voltage: 0 to -40 kV

Output Current: 30 µA

Ripple: 150 mV p-p from 0.1 Hz to 1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change

Stability: 500 mV/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

LENS 2 SUPPLY Referenced to Ground

Output Voltage: 0 to +25 kV

Output Current: 30 µA

Ripple: 150 mV p-p from 0.1 Hz to 1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.005% of maximum voltage for full load change

Stability: 1.0 volts/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

Remote Interface:

A fiber optic isolated RS232 interface is provide for remote digital control and monitoring of all power supplies and their functions.

Environmental:

Operating temperature: 10°C to 40°C

Storage temperature: -30°C to 70°C

Humidity: 10% to 90%, non-condensing

Connectors:

Accelerator, Filament and Suppressor: 75kV, 3 conductor Federal Standard Xray connector

Extractor: LGH 2I

Lens 1: LGH 3I

Lens 2: LGH 21

Input Voltage:

IEC320 EMI filtered input connector

Dimensions:

Industry standard 6U rack mounted chassis

10.5. High X 19. Wide X 21. Deep

26.7 cm X 48.3 cm X 53.34 cm

Weight:

Approximately 73 lbs (33 kg)

Regulatory Approvals:

Compliant to 2004/108/EC, The EMC Directive and 2006/95/EC, The Low Voltage Directive and designed to meet SEMI S2.

Note: All specifications are subject to change without notice. Please consult the PDF version of this datasheet for the most up-to-date revision.