ESC 系列

  • 对地参考,可逆输出。
  • 浮地,可逆双极输出。
  • +24Vdc 直流输入
  • 综合故障诊断
  • 高压安全互锁
  • 提供OEM 定制

静电卡盘高压电源

斯派曼ESC 系列电子吸盘电源为静电吸盘芯片加工应用,提供所需的干净、精确的电压。这些定制设计,好的调节在漫长的制程周期中提供精确的保护芯片。可提供对地参考可逆输出的型号,还可提供浮地双极输出并带有相关的浮地中间抽头点的型号。综合的故障诊断电路监测电源功能,并将状态数据传送到用户界面。ESC 系列电源采用紧凑、轻便封装,为 OEM 而设计,安装要求极小的系统空间。

规格

(Ref. 128093-001 REV. B)

ESC5PN25 

Output Configuration:

Single ground referenced HV output, positive or negative polarity

Input:

+24Vdc, ±5% @ 2 amps, maximum

Output:

+2kV to -5kV. 2mA @ +2kV, 5mA @ -5kV

Short Circuit Current Limit:

5.5mA, maximum

Output Isolation:

None, ground referenced output

Slew Rate:

80ms, typical

Maximum Cycle Frequency:

10 times per second

Overshoot:

<10% of set point value 

Ripple:

10Vrms

Line Regulation:

±0.7% over specified range

Load Regulation:

±0.7% over specified range

Output Voltage Accuracy:

<2% of set point value between 50-5000Vdc 

Program/Monitor Accuracy:

1% of full scale, ±50mV

Dimensions:

9.W x 1.5.H x 6.1.L (228.6mm x 30.5mm x 155mm)

Weight:

4.5lbs. (2kg)

ESC01.5PN7.5

Output Configuration:

Floating, reversible polarity bipolar output with floating center tap

Input:

+24Vdc, ±10% @ 2 amps, maximum

Output:

Bipolar, 0 to ±750Vdc (0 to 1500Vdc total) @ 5mA

Short Circuit Current Limit:

5.5mA, maximum

Output Isolation:

Center tap is isolated for ±2kV from ground

Slew Rate:

40ms, typical

Maximum Cycle Frequency:

10 times per second

Ripple:

2.5Vrms

Line Regulation:

±0.7% over specified range

Load Regulation:

±0.7% over specified range

Output Voltage Accuracy:

<1% of set point between 50-1500Vdc 

Program/Monitor Accuracy:

0.5% of full scale, ±50mV

Dimensions:

3.4.W x 3.H x 10.5.L (86.5mm x 76.5mm x 266.7mm)

Weight:

5lbs. (2.3kg)

Note: All specifications are subject to change without notice. Please consult the PDF version of this datasheet for the most up-to-date revision.