EBM

  • 适用于电子束列的三极电源
  • 高精度、低纹波、超稳定
  • 过流保护/ 过压保护
  • 电弧和短路保护
  • 提供OEM 定制
  • 符合UL、CE 和RoHS

三极管电子束列高压电源

EBM 专为扫描电子显微镜的电子束列供电,在紧凑的封装内提供了加速电源、偏置电源和灯丝电源。斯派曼专有的高压包装和封装技术,相比其他OEM 电源产品,在尺寸、成本和性能上发生了引人注目的改进。EBM 提供高调节、低纹波、超稳定的加速器电源,电流在170μA,电压从0 至-30kV可编程。EBM 提供参考加速器的浮地偏置和灯丝电源。编程信号利用差分模拟输入,来最小化外部噪声和补偿电压影响。提供一个对地参考的加速器电流监测。EBM 是有电弧和短路免疫的,连同过压和过流保护一起。

典型应用:

  • 扫描电子显微镜

CE ROHS RU Marking

规格

(Ref. 128031-001 REV. J)

Input Voltage:

+24Vdc, ±5%

High Voltage Outputs:

ACCELERATOR:

Voltage:

0V to -30kV full load with respect to ground

Current:

170µA maximum, continuous from -300V t0 -3kV

Accuracy:

±2% or ±15V (whichever is greater)

Load Regulation:

<±100ppm

Line Regulation:

<±100ppm for 22.8V to 26.4V line change

Ripple:

<15ppm p-p at -30kV, 170µA, maximum bias and filament output

Temperature Coefficient:

<100ppm/°C

Stability:

8ppm/3 minutes at 150µA load current after 1 hour warm up

BIAS:

(Referenced to Accelerator)

Voltage:

0 to +3.5kV (max allowable output limited to 2kV)

Current:

150µA maximum

Accuracy:

±5% of full scale

Line Regulation:

<±0.1% for 10% line change

Ripple:

<150mVp-p at 30kV, 150µA, max. bias and filament output

Temperature Coefficient:

<1000ppm/°C

Stability:

6V/10 minutes

FILAMENT:

(Referenced to Accelerator)

Power:

0 to 15W

Load Resistance:

1 ±5%

Accuracy:

±3% of FS or 0.1V, which ever is greater

Load Regulation:

<2% for 10% change in load resistance

Line Regulation:

<1% for 10% line change

Ripple:

<0.1% p-p max

Temperature Coefficient:

<300ppm/°C

Stability:

100ppm/10 minutes

INTERFACE:

Input:

Analog control for beam energy, filament and bias

Output:

Mini75 receptacle (Claymount CA11 or similar)

Temperature:

Operating: 0°C to +45°C

Storage: -20°C to +75°C

Humidity:

0 to 85% RH, non-condensing

Dimensions:

4.13.H x 9.85.W x 7.48.D (105mm x 250mm x 190mm) excluding any mounting brackets

Weight:

<22 lbs. (10kg)

Regulatory Approvals:

Compliant to 2004/108/EC, the EMC Directive and 2006/95/EC, the Low Voltage Directive. UL/CUL recog­nized, File E227588. Compliant to 2002/95/EC, RoHS. RoHS compliant.

表和图

DIMENSIONS: in.[mm]

FRONT VIEW

EBM 三极管电子束列高压电源 (Image 1)

TOP VIEW

EBM 三极管电子束列高压电源 (Image 2)

SIDE VIEW

EBM 三极管电子束列高压电源 (Image 3)

Note: All specifications are subject to change without notice. Please consult the PDF version of this datasheet for the most up-to-date revision.