EBM
- Electron Beam Column Triode Supply
- High Precision, Low Noise, Ultra Stable
- Arc and Short Circuit Protection
- OEM Customization Available
- UL, CE and RoHS Compliant
*Note: All specifications are subject to change without notice. Please consult the English PDF version of this datasheet for the most up-to-date revision.
Triode E-beam Column High Voltage Power Supply
The EBM powers E-Beam Columns in Scanning Electron Microscopes providing acceleration, bias and filament sources in a single compact package. Spellman’s proprietary HV packaging and encapsulation technology gives dramatic improvements in size, cost and performance compared to other SEM power supply offerings. The EBM provides a highly regulated, low noise, ultra stable accelerator supply programmable from 0 to -30kV at 170uA. The EBM has floating bias and filament supplies referenced to the accelerator. Programming signals utilize differential analog inputs to minimize external noise and offset voltages effects. A ground referenced accelerator current monitor is provided. The EBM is arc and short circuit immune, along with over voltage and over current protection.
Typical applications:
- Scanning Electron Microscope
사양
(Ref. 128031-001 REV. K)
Input Voltage:
+24Vdc, ±5%
High Voltage Outputs:
ACCELERATOR:
Voltage:
0V to -30kV full load with respect to ground
Current:
170µA maximum, continuous from -300V t0 -3kV
Accuracy:
±2% or ±15V (whichever is greater)
Load Regulation:
<±100ppm
Line Regulation:
<±100ppm for 22.8V to 26.4V line change
Ripple:
<15ppm p-p at -30kV, 170µA, maximum bias and filament output
Temperature Coefficient:
<100ppm/°C
Stability:
8ppm/3 minutes at 150µA load current after 1 hour warm up
BIAS:
(Referenced to Accelerator)
Voltage:
0 to +3.5kV (max allowable output limited to 2kV)
Current:
150µA maximum
Accuracy:
±5% of full scale
Line Regulation:
<±0.1% for 10% line change
Ripple:
<150mVp-p at 30kV, 150µA, max. bias and filament output
Temperature Coefficient:
<1000ppm/°C
Stability:
6V/10 minutes
FILAMENT:
(Referenced to Accelerator)
Power:
0 to 15W
Load Resistance:
1 ±5%
Accuracy:
±3% of FS or 0.1V, which ever is greater
Load Regulation:
<2% for 10% change in load resistance
Line Regulation:
<1% for 10% line change
Ripple:
<0.1% p-p max
Temperature Coefficient:
<300ppm/°C
Stability:
100ppm/10 minutes
INTERFACE:
Input:
Analog control for beam energy, filament and bias
Output:
Mini75 receptacle (Claymount CA11 or similar)
Temperature:
Operating: 0°C to +45°C
Storage: -20°C to +75°C
Humidity:
0 to 85% RH, non-condensing
Dimensions:
4.13.H x 9.85.W x 7.48.D (105mm x 250mm x 190mm) excluding any mounting brackets
Weight:
<22 lbs. (10kg)
Regulatory Approvals:
Compliant to EEC EMC Directive. Compliant to EEC Low Voltage Directive. UL/CUL recognized, File E227588. (EBM30N6/582, /615, /636, /833, DPL72I30/24). RoHS compliant.
테이블 및 다이어그램
DIMENSIONS: in.[mm]
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