FIBX

  • Integrated Single Chassis Solution
  • High Stability, Very Low Ripple
  • Corona Free Operation with Encapsulated HV Section
  • Optically Isolated Digital Interface

집속 이온 빔 고전압 전원 공급 장치

Spellman’s FIBX power supply is an integrated multiple output high voltage power supply specifically designed for focused ion beam. Typical applications include trans­mission and scanning electron microscopy; semiconduc­tor analysis, milling and repair; disc drive head trimming, ion beam etching and focused ion-beam lithography.

A modular design approach allows individual sub-assemblies to be easily configured in a common rack mounted 6U chassis assembly. Interface, logic and con­trol circuitry utilizes surface mount technology, minimiz­ing cost and size. Spellman’s leadership in patented power conversion technology and proprietary high volt­age packaging and encapsulation techniques provides reliable and fault free operation in all FIB operating envi­ronments.

Individual supplies (Accelerator, Filament, Extractor, Suppressor or Lens) are designed to exacting applica­tion specific standards, with ultra low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications. Isolation and control of the respective floating sources are provided via Spellman’s proprietary high voltage isolation techniques.
Customer control of this integrated FIB power supply system is accomplished via a fiber optic isolated RS-232 interface. All high voltage safety interlocks are of a fail­safe hardware based design. The FIBX is CE marked and is designed to be compliant with applicable IEC, UL and SEMI standards.

Typical applications:

  • Transmission scanning electron microscopy
  • Scanning electron microscopy
  • Semiconductor analysis, milling and repair
  • Ion beam etching
  • Focused ion-beam lithography

사양

(Ref. 128029-001 REV. G)

Input Voltage:

105 to 240Vac, 47 to 63 Hz

ACCELERATOR SUPPLY Referenced to Ground

Output Voltage: 0 to +45 kV

Output Current: 30 µA

Ripple: 200 mV p-p, from 0.1 Hz to1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change

Stability: 1.5 volts/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

FILAMENT SUPPLY Referenced to Accelerator

Output Voltage: 0 to 5 Vdc

Output Current: 0 to 5 A

Ripple: 10 mA p-p from 0.1 Hz to 1 MHz

Line Regulation: 5 mA for +/-10% line change

Load Regulation: ±0.1% of maximum voltage for full load change

Stability: 5 mA/10 minutes after 2 hour warm-up

Temperature Coefficient: 200 ppm /°C

SUPPRESSOR SUPPLY Referenced to Accelerator

Output Voltage: -2 kV to +2 kV

Output Current: 30 µA

Ripple: 150 mV p-p from 0.1 Hz to 1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change Stability: 500mV/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

EXTRACTOR SUPPLY Referenced to Accelerator

Output Voltage: 0 to -15 kV

Output Current: 400 µA

Ripple: 100 mV p-p, from 0.1 Hz to 1 MHz at 30 µA and below

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change Stability: 500mV/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

LENS 1 SUPPLY Referenced to Ground

Output Voltage: 0 to -40 kV

Output Current: 30 µA

Ripple: 150 mV p-p from 0.1 Hz to 1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.01% of maximum voltage for full load change

Stability: 500 mV/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

LENS 2 SUPPLY Referenced to Ground

Output Voltage: 0 to +25 kV

Output Current: 30 µA

Ripple: 150 mV p-p from 0.1 Hz to 1 MHz

Line Regulation: 100 mV for +/-10% line change

Load Regulation: ±0.005% of maximum voltage for full load change

Stability: 1.0 volts/10 hours after 2 hour warm-up

Temperature Coefficient: 25 ppm/°C

Remote Interface:

A fiber optic isolated RS232 interface is provide for remote digital control and monitoring of all power supplies and their functions.

Environmental:

Operating temperature: 10°C to 40°C

Storage temperature: -30°C to 70°C

Humidity: 10% to 90%, non-condensing

Connectors:

Accelerator, Filament and Suppressor: 75kV, 3 conductor Federal Standard Xray connector

Extractor: LGH 2I

Lens 1: LGH 3I

Lens 2: LGH 21

Input Voltage:

IEC320 EMI filtered input connector

Dimensions:

Industry standard 6U rack mounted chassis

10.5. High X 19. Wide X 21. Deep

26.7 cm X 48.3 cm X 53.34 cm

Weight:

Approximately 73 lbs (33 kg)

Regulatory Approvals:

Compliant to 2004/108/EC, The EMC Directive and 2006/95/EC, The Low Voltage Directive and designed to meet SEMI S2.

Note: All specifications are subject to change without notice. Please consult the PDF version of this datasheet for the most up-to-date revision.