Semiconductor

Today's complex semiconductor manufacturing processes require a variety of high voltage power solutions, most with extremely demanding specifications. Spellman products are used throughout the fab, from essentially the beginning of a wafer's journey to the end. Starting with lithography - powering light sources- to inspecting and testing devices, and covering the range from a few watts to 10's of kilowatts, our precise, low noise, highly stable power supplies are, indeed, an enabling technology. Select an application area below to learn more about the solutions we offer. Where a standard product might not meet your exact needs, we can provide customized designs for OEM applications.


Chemical Vapor Desposition

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E-Beam Evaporation

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E-Beam/I-Beam Lithography

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E-Chuck

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Flat Panel

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Ion Implantation

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Plasma Ignition

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Sputtering

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Thin Films

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